M-168 High Resolution Stepper-Mike Actuators

  • 10, 25 & 50 mm Travel Ranges
  • Resolution 0.25 µm
  • 5 Phase Stepper Motor
  • Manual Positioning Knob
  • Sub-nm Resolution with Optional PZT Actuator

 

M-168 are compact high resolution linear actuators providing linear motion up to 50 mm with sub-micron resolution. They consist of a micrometer drive with non-rotating tip driven by a 2000 half step/revolution 5-phase stepper motor. Compared to conventional rotating tip micrometer drives the non-rotating tip design offers the following advantages:

  • elimination of torque-based stage platform tilting
  • elimination of wear at the contact point
  • elimination of tip angle dependent wobble

M-168 Stepper-Mikes feature an extremely low stiction/friction construction allowing for high resolution and repeatability. A manual positioning knob provides coarse resolution of 5 µm. All models come with standard flat tips.

An optional piezo tip provides 20 µm travel with sub-nanometer resolution for dynamic scanning and tracking.

For mounting, the Stepper-Mikes are clamped around the 19 mm diameter. Clamping around the 16 mm diameter sleeve should only have a supporting function; high forces at this point will increase friction and reduce accuracy and resolution. For the same reason lateral forces on the tip must be avoided.


 

ORDERING INFORMATION:
M-168.10 Stepper-Mike Actuator, 10 mm, 0.25 µm Resolution
M-168.30 Stepper-Mike Actuator, 25 mm, 0.25 µm Resolution
M-168.40 Stepper-Mike Actuator, 50 mm, 0.25 µm Resolution

TECHNICAL DATA:

Models

M-168.10

M-168.30

M-168.40

Units

Notes

Travel range

10

25

50

mm

 

Design resolution

0.25

0.25

0.25

µm

A3

Min. incremental motion

0.25

0.25

0.25

µm

A4

Unidirectional repeatability

0.25

0.25

0.25

µm

 

Backlash

2

2

2

µm

 

Max. velocity

3

3

3

mm/sec

 

Max. push/pull force

50

50

50

N

 

Max. lateral force

0.02

0.02

0.02

N (at tip)

 

Motor resolution

2000

2000

2000

steps/rev.

 

Drive screw pitch

0.5

0.5

0.5

mm

 

* Motor type

C-545
(5 phase stepper)

C-545
5 phase stepper)

C-545
(5 phase stepper)

   

Weight

0.4

0.45

0.5

kg

 

* 24 V chopper voltage, 0.5 A / phase, 8 ohms / phase.

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.

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