M-221 - M-226 High Resolution DC-Mike Actuators

  • 10, 25 & 50 mm Travel Ranges
  • Sub-micron Resolution
  • Closed Loop DC Motor
  • Sub-nm Resolution with Optional PZT Drive

 

M-222 through M-226 are compact, ultra-high resolution linear actuators providing linear motion up to 50 mm with sub-micron resolution. They consist of a micrometer drive with non-rotating tip driven by a closed loop DC motor/gearhead combination with motor shaft mounted encoder. Compared to conventional rotating tip micrometer drives the non-rotating tip design offers the following advantages:

  • elimination of torque-based stage platform tilting
  • elimination of wear at the contact point
  • elimination of tip angle dependent wobble

 

All models feature an extremely low stiction/friction construction allowing for resolution in the 0.1 micron range and below. All models come with standard flat tips.

Versions with the part number extension .50 employ an even higher resolution motor/gearhead/encoder combination, providing design resolution of 8 nanometers and velocity up to 1.5 mm/sec. The high resolution encoder also provides better speed regulation at very low speeds.

An optional piezo tip features 20 µm travel with sub-nanometer resolution for dynamic scanning and tracking.

For mounting, the DC-Mikes are clamped around the 19 mm diameter. Clamping around the 16 mm diameter sleeve should only have a supporting function; high forces at this point will increase friction and reduce accuracy and resolution. For the same reason lateral forces on the tip must be avoided.

Vacuum Versions:
Vacuum compatible versions (10-6 Torr) of all .20 versions are available. Vacuum modifications are: vent holes, non anodized parts, special vacuum greased motors/gears/drive screws and encoders with Teflon cables. To order a vacuum model, change last digit to 3, e.g. M-224.23.

ORDERING INFORMATION: M-222.20 DC-Mike Actuator, 10 mm, 0.06 µm Resolution M-222.50 DC-Mike Actuator, 10 mm, 0.008 µm Resolution M-224.20 DC-Mike Actuator, 25 mm, 0.06 µm Resolution M-224.50 DC-Mike Actuator, 25 mm, 0.008 µm Resolution M-226.20 DC-Mike Actuator, 50 mm, 0.06 µm Resolution M-226.50 DC-Mike Actuator, 50 mm, 0.008 µm Resolution

 

 

TECHNICAL DATA:

Models

M-222.20

M-224.20

M-226.20

M-222.50

M-224.50

M-226.50

Units

Notes

Travel range

10

25

50

10

25

50

mm

 

Design resolution

0.059

0.059

0.059

0.0085

0.0085

0.0085

µm

A3

Min. incremental motion

0.1

0.1

0.1

0.05

0.05

0.05

µm

A4

Unidirectional repeatability

0.1

0.1

0.1

0.1

0.1

0.1

µm

 

Backlash

5

5

5

2

2

2

µm

 

Max. velocity

0.7

0.7

0.7

1.5

1.5

1.5

mm/sec

 

Max. push/pull force

40

40

40

100

100

100

N

 

Max. lateral force

0.02

0.02

0.02

0.02

0.02

0.02

N (at tip)

 

Encoder resolution

60

60

60

2000

2000

2000

counts/rev.

 

Drive screw pitch

0.5

0.5

0.5

0.5

0.5

0.5

mm/rev.

 

* Gear ratio

(31/9)4 :1 » 141:1

(31/9)4 :1 » 141:1

(31/9)4 :1 » 141:1

(28/12)4 :1 » 29.6:1

(28/12)4 :1 » 29.6:1

(28/12)4 :1 » 29.6:1

   

Nominal motor power

2

2

2

3

3

3

W

 

Motor voltage range

0 to ±12

0 to ±12

0 to ±12

0 to ±12

0 to ±12

0 to ±12

V

 

Weight

0.16

0.22

0.26

0.4

0.45

0.5

kg

 

Recommended motor controller

C-842,
C-844

C-842,
C-844

C-842,
C-844

C-842,
C-844

C-842,
C-844

C-842,
C-844

 

D2

* Other gear ratios on request

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.

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