Rotary Piezo Motors: Direct Drive, Self Locking At Rest

These precision rotation stages are actuated by direct-drive ultrasonic and inertia motors, based on piezoceramic elements directly coupled to a rotary platform.  Ultrasonic motor provide higher speed, inertia motors can be made even smaller.   Both are self-locking at rest and achieve high resolution and stability. 


Miniature Rotation Stages with Ultrasonic Piezo Motors

High Speed

Ultrasonic motors provide very fast start/stop behavior, smooth motion with a very wide dynamic range from microns/second to 100’s of millimeters/second. Both linear and rotary ultrasonic motors are based on compact piezo ceramic elements driven at high frequencies of 10’s to 100’s of kHz (beyond the human hearing range). Each oscillation cycle transfers nanoscopic motion to a linear or rotary ceramic surface bonded to a linear runner or rotary platform.

U-622 Ultra-Compact Rotary Stage
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U-622 Ultra-Compact Rotary Stage

Ultrasonic Direct Drive Motor

  • 175µrad encoder resolution 
  • 720°/sec velocity
  • 18.5mm table diameter
  • Self clamping motor design
  • Vacuum options
U-624 Mini Rotary Stage
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U-624 Mini Rotary Stage

Ultrasonic Direct Drive Motor

  • 35µrad encoder resolution 
  • 720°/sec velocity
  • 28.5mm table diameter
  • Self clamping motor design
  • Vacuum options

 

 

U-628 Compact Rotary Stage
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U-628 Compact Rotary Stage

Ultrasonic Direct Drive Motor

  • 17µrad encoder resolution 
  • 720°/sec velocity
  • 48.5mm table diameter
  • Self clamping motor design
  • Vacuum options

Low Profile Rotation Stages with Ultrasonic Piezo Motors

High Speed

U-651 Low Profile Rotary Stage
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U-651 Low Profile Rotary Stage

Ultrasonic Direct Drive Motor

  • 4µrad  & 9µrad encoder resolution 
  • 540°/sec velocity
  • 108mm table diameter
  • Self clamping motor design
  • Vacuum options

Miniature Rotation Stages with Inertia Piezo Motors

Medium Velocity

PIshift inertia-type piezo motors provide resolution in the micron to nanometer range.  These extremely compact motors can be integrated into linear and rotary stages. The drive principle is based on a cyclical alternation of static und sliding friction between a moving runner and the drive element, related to the classic tablecloth trick.

Piezo inertia motors can be operated in open loop, but for high accuracy and repeatability, a position encoder is integrated in the stage. Vacuum compatible and non-magnetic versions are also offered. The PIShift piezo inertia drive is very quiet, due to its high operating frequency of 20 kHz. 

Q-614 Sub-Miniature Rotary Stage
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Q-614 Sub-Miniature Rotary Stage

Piezo Inertia Direct Drive Motor

  • 1µrad open loop resolution
  • 70°/sec velocity
  • 14mm table diameter
  • Self clamping motor design
  • Vacuum options
Q-622 Sub-Miniature Rotary Stage
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Q-622 Sub-Miniature Rotary Stage

Piezo Inertia Direct Drive Motor

  • 0.55µrad encoder resolution 
  • 70°/sec velocity
  • 21.5mm table diameter
  • Self clamping motor design
  • Vacuum options
Q-632 miniature piezo driven rotary stages come in diameters from 14 to 32 mm. They provide microradian resolution and velocity to 45°/sec. Q-632 stages can be combined with the Q-522 series of linear positioners.
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Q-632 Sub-Miniature Rotary Stage

Piezo Inertia Direct Drive Motor

  • 0.75µrad encoder resolution 
  • 45°/sec velocity
  • 30mm table diameter
  • Self clamping motor design
  • Vacuum options