PI’s flexure guided nanositioning stages are based on the award-winning PICMA® long-life low-voltage piezo actuators, manufactured at PI’s piezo ceramic division PI Ceramic. These co-fired, monolithic multilayer actuators are protected by ceramic insulation allowing higher protection and lifetime compared to conformal coatings. All flexure stages are FEA-optimized and produced by wire EDM cutting, for highest precision and smallest tolerances. They are free of friction, wear and maintenance. Careful attention to mass reduction allows millisecond or microsecond range response and settling performance ideal for highly dynamic processes such as alignment, tracking, and scanning.
Several options for position feedback sensors are available for closed-loop operation. Strain gauges, piezo-resistive semiconductor sensors and capacitive sensors are offered to cover different requirements.