XYZ Piezo Nanopositioning Stages / Flexure Guided Stages

Three axis (XYZ) piezo nanopositioning stages can be used in a variety of industrial and research applications. Semiconductor metrology related systems and high-resolution scanning microscopy have long relied on the precision and speed of XYZ piezo stages. 3D nano-printing, 3D lithography, and the production of micro-structures by two-photon polymerization are made possible by these very precise and fast positioners and scanners. Travel ranges from a few microns to millimeters can be covered with flexure guides. Piezo nanopositioners are well suited for precision positioning of optics, photonics components, fibers, lasers diodes, and bio-samples.

PI offers different types of multi-axis piezo stages, most with large apertures for optics applications.

 

Compact XYZ Piezo Nanopositioning Stages

P-616 and P-611 both provide 100µm travel, but are based on different designs. The P-616 uses capacitive position sensors and a parallel-kinematic design which provide better dynamics for all axes. The P-611 is based on a serial kinematics design and uses strain gauge sensors for position measurement. 

P-363 and P-313 provide small travel ranges of 5µm and 1µm respectively, but picometer range resolution and extremely high dynamics due to their direct-drive design. They are used for atomic force applications. The P-313 makes use of a highly linear electro-active material that does not require position feedback and allows higher bandwidth scanning.

P-616 Compact XYZ Piezo Scanner
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P-616 Compact XYZ Piezo Scanner

PKM = Higher Performance

  • 100µm XYZ motion
  • Parallel-kinematics (PKM)
  • Compact (40x40x40mm)
  • <1 nanometer resolution
  • Ideal for fast scanning
P-611 NanoCube® XYZ Piezo Stage
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P-611 NanoCube® XYZ Piezo Stage

100µm, Affordable System

  • 100µm XYZ motion
  • Compact: 44x44x44mm
  • 1 nanometer resolution
  • Strain gauge sensors
  • Fast response
P-363 PicoCube XY(Z) Piezo Stages
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P-363 PicoCube XY(Z) Piezo Stages

Nanotechnology, SPM, AFM

  • 5µm motion, 50pm resolution
  • Ultra-high performance scanner for AFM/SPM, nano-manipulation
  • Closed-loop, parallel-metrology
  • Capacitive feedback
P-313 PicoCube XY(Z) Stage
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P-313 PicoCube XY(Z) Stage

Ultra-Linear Piezo Drive

  • 1µm motion
  • 20 picometer resolution
  • Highly linear piezo material - does not require closed-loop operation
  • Faster response, higher bandwidth

XYZ and XY-Rot-Z Piezo Nanopositioning Stages with Aperture

These multi-axis stages provide large apertures to facilitate optical applications. Stages with direct-drives provide higher dynamics, but limited travel ranges. Integrated flexure motion amplifiers are used to provide longer travel ranges of 100µm and above. 

P-733.3DD High-Dynamics Scanners
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P-733.3DD High-Dynamics Scanners

Fastest XYZ Piezo Stages

  • 30x30x10µm motion
  • Direct drive = Higher dynamics
  • Up to 2.2 kHz resonant frequency
  • 100 picometers resolution
  • Frictionless precision flexure guides
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P-545 Particle Tracking Stage

High Dynamics in XY/Z

  • 70x70x50µm motion
  • Direct drive = Higher dynamics
  • Easy integration in microscopes
  • Sub-nanometer resolution
P-733 XYZ Piezo Scanning Stages
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P-733 XYZ Piezo Scanning Stages

Parallel Metrology, 100µm

  • 100x100x10µm motion
  • <0.3 nanometer resolution
  • Capacitive feedback
  • 50x50mm aperture
  • Frictionless precision flexure guides
P-517, P-527 Piezo Stages
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P-517, P-527 Piezo Stages

XYZ, XY-Rot-Z, 100 & 200µm

  • XY: 100 & 200µm; Z: 20µm
  • Up to 4mrad θZ (yaw)
  • Sub-nanometer resolution
  • Capacitive feedback
  • 66x66mm aperture
P-561 / 2 /3 PImars, XYZ Piezo Stage
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P-561 / 2 / 3 PImars, XYZ Piezo Stage

High End Performance, to 300µm

  • 100-300µm XY & XYZ motion
  • Six-axis option
  • Sub-nanometer resolution
  • Ultra-fast XY and XYZ versions
  • PICMA® long-life piezo drives
  • 200µm motion 
  • Nanometer resolution
  • Easy integration in microscopes
  • Sensor choice: Piezoresistive (PRS) - lower cost; Capacitive - higher linearity

Award-Winning PICMA® Long-Life Low-Voltage Technology

PI’s flexure guided nanositioning stages are based on the award-winning PICMA® long-life low-voltage piezo actuators, manufactured at PI’s piezo ceramic division PI Ceramic. These co-fired, monolithic multilayer actuators are protected by ceramic insulation allowing higher protection and lifetime compared to conformal coatings. All flexure stages are FEA-optimized and produced by wire EDM cutting, for highest precision and smallest tolerances.  They are free of friction, wear and maintenance. Careful attention to mass reduction allows millisecond or microsecond range response and settling performance ideal for highly dynamic processes such as alignment, tracking, and scanning.

Several options for position feedback sensors are available for closed-loop operation.  Strain gauges, piezo-resistive semiconductor sensors and capacitive sensors are offered to cover different requirements.