P-780 Miniature High Precision Nanopositioning Stage with Piezo Drive and Flexure Guidance – High Speed Scanning NanoPositioners

  • Amplified Piezo Stage
  • Extremely Compact
  • 80 µm Range
  • Nanometer Resolution
  • Fast Response for High Speed Scanning (1 kHz Resonant Frequency)

P-780 high precision, high speed miniature nanopositioning stages are piezo driven and flexure guided for ultra-high performance. These Piezo Flexure Nanopositioning Translation Stages are extremely compact and fast devices, providing a positioning and scanning range of up to 80 µm with settling time of only a few milliseconds. The P-780 high precision scanning linear stage is designed for applications with loads up to 100 grams. Both open loop and closed loop feedback versions with integrated LVDT (Linear Variable Differential Transformer) feedback sensors are offered to suit your application.

Application Examples

Metrology, nanopositioning, scanning microscopy, disk drive testing, fiber optics, scanning interferometry, bio-technology, micromanipulation, etc.

Working Principle

The P-780 miniature Translation stage is based on an amplified piezo mechanism and equipped with ultra-reliable multilayer piezoelectric drives integrated into a sophisticated flexure guiding system. The force exerted by the piezo pusher drives a multi-flexure parallelogram via an integrated motion amplifier. The wire EDM (Electric Discharge Machining) cut flexures are FEA (Finite Element Analysis) modeled for zero stiction/friction, ultra-high resolution and exceptional guiding precision. An integrated LVDT position feed- back sensor provides nanometer scale resolution and stability in closed loop operation (with PI electronics recommended below).

TECHNICAL DATA:

Models

P-780.00

P-780.20

Units

Notes

Active axes

X

X

  

Open loop travel @ 0 to 100 V

80

80

µm ± 20 %

A2

Closed loop travel ³

-

80

µm

A5

Integrated feedback sensor

-

LVDT

 

B

Closed / open loop ** resolution £

- / 1

10 / 1

nm

C1

Closed loop linearity (typ.)

-

0.1

%

 

Full range repeatability (typ.)

-

±20

nm

C3

Stiffness

1.5

1.5

N/µm ± 20 %

D1

Push/pull force capacity
(in operating direction)

50 / 5

50 / 5

N

D3

Max. (+/-) normal load

1

1

kg

D4

Lateral force limit

10

10

N

D5

Lateral runout (X/Y/Z) (typ.)

10

10

nm

E2

Electrical capacitance

3.6

3.6

µF ± 20 %

F1

* Dynamic operating current coefficient
(DOCC)

5.6

5.6

µA/(Hz x µm)

F2

Unloaded resonant frequency

1000

1000

Hz ± 20 %

G2

Resonant frequency @ 100 g load

600

600

Hz ± 20 %

G3

Operating temperature range

- 20 to 80

- 20 to 80

° C

H2

Voltage connection

VL

VL

 

J1

Sensor connection

-

L

 

J2

Weight (with cables)

150

170

g ± 5 %

 

Body material

N-S

N-S

 

L

Recommended Amplifier/Controller

G, C

H, E

 

M

* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example: Sinusoidal scan of 30 µm at 10 Hz requires approximately 1.7 mA drive current.

** Noise equivalent motion with E-503 amplifier.

Related Products and Additional Resources

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.

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