Ultra Small NanoAutomation Stages - Piezo Flexure Stages

  • Smallest Flexure Guided Stages with Capacitive Sensors
  • Dimensions: 15 x 25 x 6 mm
  • Precision Trajectory Control
  • 10 µm Scan and Positioning Range, 0.05 nm Resolution
  • Ultra-fast Response
  • Integrated ID Chip (Calibration Sheet) Available
  • Ultra-Fast Digital Controllers with Fiber Interface Available
  • Latest Feed Forward Techniques for Elimination of Self-generated Resonances available


Additional Miniature Linear Stages with Piezo and Motorized Drives

PI supplies the smallest commercially available Piezo linear stages for Nano-Positioning with ultra-precision tracjectory control. The latest generation of NanoAutomation systems combine highest resolution, accuracy with very fast settling time and extremely small rotational errors. They are equipped with capacitive feedback sensors providing sub-nanometer resolution and stability.

Careful attention to mass minimization results in significant reduction in inertial recoil forces applied to the supporting structures enhancing overall system throughput and stability.

The stages are available with integrated ID chip (calibration sheet)for ease of interchangeability. They can be operated with PI's ultra-fast E-753 Digital Controllers featuring an ultra fast (1 Mbit/sec), FiberLink Interface with galvanic isolation to eliminate coupled EMI as a source of low-level position modulation distance up to 50 m). These controllers are equippped with the latest Feed Forward Techniques for elimination of self-generated resonances anywhere the equipment

Application examples:
Disk drive testing, metrology, nanopositioning, scanning microscopy, fiber optics, scanning interferometry, bio-technology, micromanipulation etc.

Working principle:
NanoAutomation stages are equipped with multilayer piezoelectric drives integrated into a sophisticated flexure guiding system. The wire EDM (Electric Discharge Machining) cut flexures are FEA (Finite Element Analysis) modeled for zero stiction/friction, ultra-high resolution and exceptional guiding precision. An integrated capacitive position feedback sensor provides subnanometer resolution and stability in closed loop operation (with PI electronics).

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model

Piezo Flexure Stage Overview


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