6-Axis Piezo Nanopositioning Stages

Three of the 6-axis nanopositioning stages shown here are based on piezo stack/flexure guide mechanisms. The other models are based on crossed-roller bearings and piezo motors, providing longer travel ranges.

Piezo stack/flexure stages are completely free of friction, wear and maintenance and provide very fast response, settling and resolution without backlash and reversal play. However, motion ranges are typically limited to a few 100 microns.

PI offers a large variety of multi-axis piezo stages, most with large apertures for optics applications. 

6-Axis Piezo Flexure Nanopositioning Stages

P-562 6-Axis Piezo Stage
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P-562 6-Axis Piezo Stage

High End Performance, 200µm

  • 200µm linear motion
  • 1mrad rotation (pitch, yaw, roll)
  • Sub-nanometer resolution
  • Parallel kinematics/metrology
  • PICMA® long-life piezo drives
P-587 6-Axis Piezo Nanoposiitioner
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P-587 6-Axis Piezo Nanoposiitioner

Long-Travel, Parallel Metrology

  • 800x800x200µm linear motion
  • 1 mrad rotation (pitch, yaw, roll)
  • For 6-axis scanning and positioning
  • Precision trajectory control
  • Direct capacitive feedback
P-915 Piezo Hexapod
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P-915 Piezo Hexapod

6-Axis, Highest Dynamics

  • 70µm XYZ motion
  • 1.4mrad rotation (pitch, yaw, roll)
  • For 6-axis error correction
  • Sub-nm repeatability
  • Direct capacitive feedback

6-Axis Stages with Piezo Motors

Long Travel (up to 16mm)

Low Profile Parallel/Serial Kinematics Systems
These 6 axis positioning systems are based on three XY linear stages, with integrated linear encoders, driven by piezo linear motors. The three stage pairs actuate a tripod, in a way to provide highly precise motion in all 6 degrees of freedom. The Q-821 and Q-845 models are driven by inertia piezo motors, the N-865 low profile version uses a higher force PiezoWalk motor.


N-865 High End Version
N-865 is based on the higher performing PiezoWalk drives and high-end PIone linear encoders. These special encoders manufactured by PI have been tested to provide resolution down to the picometer range. With an extremely high pitch grid period of only 0.5µm, and a read head based on a Mach-Zehnder interferometer, they can deliver exceptional linearity.

Q-821 Sub-Mini 6-Axis Platform
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Q-821 Sub-Mini 6-Axis Platform

Ultra-Compact, Piezo Inertia Motors

  • 12x12x6mm XYZ travel
  • 12x12x33° rotary travel
  • 0.2kg load
  • 1nm sensor resolution
  • 5mm/sec max. velocity
  • Ø80mm base, 48mm height
Q-845 Miniature 6-Axis Platform
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Q-845 Miniature 6-Axis Platform

Compact, Piezo Inertia Motors

  • 14x14x10mm XYZ travel
  • 14x14x16° rotary travel
  • 1kg load
  • 1nm sensor resolution
  • 5mm/sec max. velocity
  • Ø174mm base, 77mm height
N-865 Ultra-Precise 6-Axis Platform
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N-865 Ultra-Precise 6-Axis Platform

2nm Min. Incremental Motion

  • 13x13x10mm XYZ travel
  • 14x14x16° rotary travel
  • 1.5kg load
  • <0.5nm sensor resolution
  • 5mm/sec max. velocity
  • For ultra-precision requirements

How Piezo Actuators and Flexures Work

With the use of flexures mechanisms, the motion of a piezo stack can be multiplied many times to achieve up to one millimeter travel (or more in extreme cases).  Flexures can be designed to also double as guiding and preloading mechanisms. Flexure motion is based on the elastic deformation (flexing) of a solid material. Friction and stiction are entirely eliminated, and flexures exhibit high stiffness, load capacity, and resistance to shock and vibration. Flexures are maintenance free and not subject to wear. They are vacuum compatible, operate over a wide temperature range, and require neither lubricants nor compressed air for operation.