- Closed Loop Servo Feedback Motor Drive with 1 µrad Resolution
- Piezo Drive Option for Highest Resolution, Precision and Dynamic Scanning and Tracking
- 360 ° Coarse Range, > 20 ° Fine Range
- 30 mm ø Clear Aperture
- Standard Limit Switches
M-036 high performance series of closed-loop servo motor driven precision rotation tables provide the highest resolution, excellent repeatability and minimum wobble. The stages are equipped with double rotational ball bearings for minimum backlash and high load capacity. Both the rotation platform and the scale ring (graduated in 2-degree increments) can be independently coarse positioned over 360 degrees and then be locked by screws.
The basic version, M-036.D0, is equipped with a DC servo motor drive providing a rotational range of ±10.5 degrees. A set of limit switches eliminates the possibility of overtravel.
The ultra-high precision rotational stage versions M-036.DS and M-036.DP provide additional piezoelectric µrad fine adjustment over a range of ±350 µrad. The piezoelectric fine motion range also allows dynamic scanning and tracking.
The .DS version is equipped with a closed loop PZT drive (model P-841.30), while the .DP version comes with an open loop PZT actuator (model P-840.30). Both drives provide a linear range of 45 microns and sub-nanometer linear resolution (see "PZT Actuators" section for further details and recommended drivers).
For the highest precision and highest performance, high speed air bearing rotary tables are recommended.
See "Accessories", for adapters, brackets, etc.
ORDERING INFORMATION:
M-036.D0 Tangential Arm Rotary Stage, ø 100 mm, Closed-Loop Servo Feedback Motor
M-036.DP Tangential Arm Rotary Stage, ø 100 mm, Closed-Loop Servo Feedback Motor + Piezo Drive
M-036.DS Tangential Arm Rotary Stage, ø 100 mm, Closed-Loop Servo Feedback Motor + Closed Loop Piezo Drive
TECHNICAL DATA: | |||||
Models | M-036.D0 | M-036.DP | M-036.DS | Units | <link>Notes |
Rotation range coarse | 360 | 360 | 360 | deg | |
Rotation range motorized | ±10.5 | ±10.5 | ±10.5 | deg | |
Rotation range (PZT drive) | - | ±350 | ±350 | µrad | |
Min. incremental motion | - | 1 | 1 | µrad | A4 |
Repeatability (PZT drive) | - | - | 2 | µrad | |
Design resolution (DC motor) | 0.88 | 0.88 | 0.88 | µrad | A3 |
Min. incremental motion | 2 | 2 | 2 | µrad | A4 |
Rotation / linear input | 15 | 15 | 15 | µrad / µm | A5 |
Tangent arm length | 66 | 66 | 66 | mm | A5 |
Unidirectional repeatability | 10 | 10 | 10 | µrad | |
** Backlash | 80 | 80 | 80 | µrad | |
Wobble | < 75 | < 75 | < 75 | µrad | |
Max. velocity | 0.6 | 0.6 | 0.6 | ° /sec | |
Maximum axial force | ± 400 | ± 400 | ± 400 | N | |
Maximum torque (q X, q Y) | ± 6000 | ± 6000 | ± 6000 | mNm | |
Maximum torque CW* | 4500 | 4500 | 4500 | mNm | |
Maximum torque CCW* | 75 | 75 | 75 | mNm | |
Drive | M-224.20 | M-224.20 | M-224.20 | ||
PZT drive | - | P-840.30 | P-841.30 | D1 | |
Weight | 1.05 | 1.15 | 1.17 | kg | |
Recommended PZT controller | - | A, C, G | D, H | M | |
Material | Al, St | Al, St | Al, St | Al, St | L |
Recommended motor controller | C-842, | C-842, | C-842, | D2 |
This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.