This product has been replaced by the following new product: Q-521 Q‑Motion® Miniature Linear Stage

Q-522 Q-Motion® Miniature Linear Stage

Piezo Motors for Small Dimensions, High Resolution, and a Favorable Price

  • Only 22 mm in width and 10 mm in height
  • Direct position measurement with incremental encoder with up to 1 nm resolution
  • Minimum incremental motion up to 2 nm
  • XY mounting without adapter
  • Q-622 rotation stage mountable without adapter
  • Suitable for vacuum to 10-6 hPa, versions to 10-9 hPa available
Q-522 Q-Motion® Miniature Linear Stage
Product Description Specifications Downloads Quote / Order

Piezoelectric inertia drive

Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. With an operating frequency of up to 20 kHz, the drives acting directly on the runner and achieve velocities of max. 10 mm/s.

Direct-measuring principle

Versions with noncontact optical linear encoder available. Resolution 4 nm or 1 nm, depending on the version. Versions with encoder have a reference point switch

Vacuum and nonmagnetic environments

All Q-Motion® linear stages are suitable for operation in high vacuum to 10-6 hPa. Furthermore, ultrahigh vacuum variants are also available for 10-9hPa. Nonmagnetic versions are available on request

Application fields

Microassembly, Photonics, Optical alignment, Microscopy, Beamline instrumentation, Semiconductor technology, Testing

Specifications

This content is only available on tablets or desktop devices.

Downloads

Product Note

Product Note

Product Change Notification Q-xxx; N-765

Version / Date
2019-03-26
pdf - 435 KB
English

Documentation

Documentation

User Manual MP134

Q-522 Q-Motion Miniature Linear Stage, Piezoelectric Inertia Drive

Version / Date
1.0.1 2019-08-23
pdf - 2 MB
Version / Date
1.0.1 2019-08-23
pdf - 2 MB
Documentation

Short Instructions MP139EK

Q-Motion® Positioners: Q-5xx, Q-6xx

Version / Date
4.3.0 03/2024
pdf - 626 KB
Version / Date
4.3.0 03/2024
pdf - 661 KB

3-D Models

3-D Models

Q-522 3-D model

zip - 2 MB

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

Q-522.000

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 6.5 mm travel range, without position sensor for open-loop operation, 1 N push/pull force, dimensions 22 × 22 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa

Q-522.00U

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 6.5 mm travel range, without position sensor for open-loop operation, 1 N push/pull force, dimensions 22 × 22 × 10 mm (W × L × H), vacuum compatible to 10-9 hPa

Q-522.030

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 6.5 mm travel range, Linear encoder, 4 nm resolution, 1 N push/pull force, dimensions 32 × 22 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa

Q-522.040

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 6.5 mm travel range, Linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 32 × 22 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa

Q-522.04U

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 6.5 mm travel range, Linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 32 × 22 × 10 mm (W × L × H), vacuum compatible to 10-9 hPa

Q-522.100

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 13 mm travel range, without position sensor for open-loop operation, 1 N push/pull force, dimensions 22 × 32 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa

Q-522.10U

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 13 mm travel range, without position sensor for open-loop operation, 1 N push/pull force, dimensions 22 × 32 × 10 mm (W × L × H), vacuum compatible to 10-9 hPa

Q-522.130

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 13 mm travel range, Linear encoder, 4 nm resolution, 1 N push/pull force, dimensions 32 × 32 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa

Q-522.140

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 13 mm travel range, Linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 32 × 32 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa

Q-522.14U

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 13 mm travel range, Linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 32 × 32 × 10 mm (W × L × H), vacuum compatible to 10-9 hPa

Q-522.200

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 26 mm travel range, without position sensor for open-loop operation, 1 N push/pull force, dimensions 22 × 42 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa

Q-522.20U

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 26 mm travel range, without position sensor for open-loop operation, 1 N push/pull force, dimensions 22 × 42 × 10 mm (W × L × H), vacuum compatible to 10-9 hPa

Q-522.230

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 26 mm travel range, Linear encoder, 4 nm resolution, 1 N push/pull force, dimensions 32 × 42 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa

Q-522.240

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 26 mm travel range, Linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 32 × 42 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa

Q-522.24U

Q-Motion® Miniature linear stage, piezoelectric inertia drive, 26 mm travel range, Linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 32 × 42 × 10 mm (W × L × H), vacuum compatible to 10-9 hPa

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