Q-521 Q-Motion® Miniature Linear Stage

Smallest Linear Stage with Position Control, High Resolution and Affordable Price

Q-521 Q-Motion® Miniature Linear Stage
Product Description Specifications Downloads Quote / Order
  • Only 21 mm in width and 10 mm in height
  • Direct position measurement with integrated incremental encoder
  • Encoder resolution up to 1 nm
  • Minimum incremental motion up to 2 nm
  • Multi-axis system setups with adapter plate or bracket (available as an option)
  • Suitable for vacuum to 10-6 hPa, versions to 10-9 hPa available

Piezoelectric inertia drive

Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. With an operating frequency of up to 20 kHz, the drives acting directly on the runner and achieve velocities of max. 10 mm/s.

Direct-measuring principle

Versions with noncontact optical linear encoder available. Resolution 4 nm or 1  nm, depending on the version. Versions with encoder have a reference point switch.

Vacuum and nonmagnetic environments

All Q-Motion® linear stages are suitable for operation in high vacuum to 10-6 hPa. Furthermore, ultrahigh vacuum variants for 10-9 hPa are also available. Nonmagnetic versions are available on request.

Application fields

Microassembly, Photonics, Optical alignment, Microscopy, Beamline instrumentation, Semiconductor technology, Testing

Specifications

Datasheet Q-521

Version / Date
2018-05-02
Version / Date
2018-05-02
Version / Date
2018-06-21
Document language
pdf - 710 KB
pdf - 708 KB
pdf - 799 KB

Downloads

Datasheet

Datasheet Q-521

Version / Date
2018-05-02
Version / Date
2018-05-02
Version / Date
2018-06-21
Document language
pdf - 710 KB
pdf - 708 KB
pdf - 799 KB

Documentation

Short Instructions MP139EK

Q-5xx, Q-6xx PIShift Stages
Version / Date
3.1.0 2018-06-19
pdf - 696 KB

User Manual MP145

Q-521 Q-Motion Miniature Linear Positioning Stage, Piezoelectric Inertia Drive
Version / Date
2016-03-17
Version / Date
2016-03-15
Document language
pdf - 3 MB
pdf - 3 MB

3-D Models

Q-521 STEP

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

Q-521,100
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 12 mm travel range, without position sensor for open-loop operation, 1 N push/pull force, dimensions 21 × 30 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-521.130
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 12 mm travel range, Linear encoder, 4 nm resolution, 1 N push/pull force, dimensions 21 × 30 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-521,140
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 12 mm travel range, Linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 × 30 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-521.14U
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 12 mm travel range, Linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 × 30 × 10 mm (W × L × H), vacuum compatible to 10-9 hPa
Q-521,200
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 22 mm travel range, without position sensor for open-loop operation, 1 N push/pull force, dimensions 21 × 32 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-521.230
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 22 mm travel range, Linear encoder, 4 nm resolution, 1 N push/pull force, dimensions 21 × 32 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-521.240
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 22 mm travel range, Linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 × 32 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-521.24U
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 22 mm travel range, Linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 × 32 × 10 mm (W × L × H), vacuum compatible to 10-9 hPa
Q-521,300
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 32 mm travel range, without position sensor for open-loop operation, 1 N push/pull force, dimensions 21 × 42 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-521.330
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 32 mm travel range, Linear encoder, 4 nm resolution, 1 N push/pull force, dimensions 21 × 42 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-521.340
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 32 mm travel range, Linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 × 42 × 10 mm (W × L × H), vacuum compatible to 10-6 hPa
Q-521.34U
Q-Motion® Miniature linear stage, piezoelectric inertia drive, 32 mm travel range, Linear encoder, 1 nm resolution, 1 N push/pull force, dimensions 21 × 42 × 10 mm (W × L × H), vacuum compatible to 10-9 hPa

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