N-565 Linear Stage with the Highest Precision

NEXACT® Piezo Stepping Drive with Subnanometer Encoder Resolution

  • Ultraprecision: 3 nm minimum incremental motion and direct-measuring PIOne encoder with 0.5 nm resolution
  • Long travel ranges: 13 mm, 26 mm or 52 mm
  • Self-locking when switched off: Saves energy and reduces generation of heat
  • Long lifetime and high reliability due to PiezoWalk® technology
  • Compact design: 65 mm width, 20 mm height
N-565 Linear Stage with the Highest Precision
Product Description Specifications Downloads Quote / Order

NEXACT® reference-class linear stage

Linear stage with NEXACT® PiezoWalk® drives allow high-precision positioning in the nanometer range over long travel ranges. They are equipped with direct-measuring linear encoders and crossed roller bearings for the highest accuracy.

PiezoWalk® technology: High resolution and low wear

The PiezoWalk® technology combines the technological advantages of piezo actuators with those of piezomotors. PiezoWalk® walking drives offer not only subnanometer resolution, high forces, and high stiffness but allow theoretically unlimited travel ranges. In contrast to other piezo-motorized drive principles, PiezoWalk® walking drives are not subject to sliding friction effects. They are based on stiction contacts of several piezo actuators that step along a runner. At rest, PiezoWalk® walking drives are self-locking, consume no energy, and do not generate heat.

Direct position measuring with PIOne linear encoder

The high-resolution PIOne encoder was developed by PI and, with corresponding processing of the measured value, allows a position resolution of much less than one nanometer. In addition, due to the short signal period and the high quality of the signals, the linearity error of PIOne encoders is less than 1 %. PIOne encoders support direction sensing when evaluating a reference signal.

Application fields

Sample manipulation, sample positioning, optics or mechanical components with high precision and stability, precision mechanics in the semiconductor industry, micromanipulation, microscopy, automation, applications in confined spaces, applications in nonmagnetic environments.

Specifications

Datasheet

Datasheet N-565

Version / Date
2023-11-20
pdf - 925 KB
Version / Date
2023-11-20
pdf - 928 KB
Version / Date
2019-10-17
pdf - 780 KB

Downloads

Product Note

Product Note

Product Change Notification Motor Driven Products

Version / Date
2021-04-19
pdf - 917 KB
English

Datasheet

Datasheet

Datasheet N-565

Version / Date
2023-11-20
pdf - 925 KB
Version / Date
2023-11-20
pdf - 928 KB
Version / Date
2019-10-17
pdf - 780 KB

Documentation

Documentation

User Manual MP148

N-565 NEXACT® Linear Stage

Version / Date
1.5.0 2021-02-23
pdf - 2 MB
Version / Date
1.5.0 2021-02-23
pdf - 2 MB
Documentation

Short Instructions MP137EK

NEXACT® Positioners: N-524, N-565

Version / Date
3.0.1 01/2023
pdf - 1,015 KB
Version / Date
3.0.1 01/2023
pdf - 1,024 KB

3-D Models

3-D Models

N-565 3-D model

zip - 8 MB

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.

N-565.160

Linear stage with the highest precision; NEXACT® piezo walking drive; 13 mm travel range; 20 N load capacity; 10 mm/s maximum velocity; PIOne: incremental linear encoder, 0.5 nm sensor resolution; 3 m cable length

N-565.260

Linear stage with the highest precision; NEXACT® piezo walking drive; 26 mm travel range; 20 N load capacity; 10 mm/s maximum velocity; PIOne: incremental linear encoder, 0.5 nm sensor resolution; 3 m cable length

N-565.360

Linear stage with the highest precision; NEXACT® piezo walking drive; 52 mm travel range; 20 N load capacity; 10 mm/s maximum velocity; PIOne: incremental linear encoder, 0.5 nm sensor resolution; 3 m cable length

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