XYZ Nanopositioning Stage, Piezo Driven

PIMars™ XYZ Piezo Systems, 100µm, 200µm, 300µm Travel

  • Nanopositioning Stage with Closed-Loop Piezo Actuators
  • Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Motion Ranges to 340 x 340 x 340 µm
  • Capacitive Nanopositioning Sensors for Highest Linearity
  • Frictionless, High-Precision Flexure Guiding System
  • Excellent Scanning Flatness
  • High-Dynamics XYZ Version Available; Custom Versions to 6-DOF
  • Clear Aperture 66 x 66 mm
  • Outstanding Lifetime Due to PICMA® Piezo Actuators
  • UHV Versions to 10-9 hPa


Nanopositioning Stage Overview

Helpful Links