Nano-Focus Stages for Surface Metrology
High Speed, Piezo Scanner for Microscope Objectives - P-725.xDD PIFOC®
- Nanopositioning Z-stage with Sub-Nanometer Resolution, for Microscopy and Surface Metrology in Semiconductor Manufacturing
- Very Stiff Design for Fastest Settling Time under 5 msec with Microscope Objective
- Motion Ranges from 20µm up to 7mm
- Compatible with Metamorph™ and other Image Acquisition Software Packages
- Scans and Positions Objectives with Sub-nm Resolution
- Parallel Flexure Guiding for Minimized Objective Offset
- Choice of Position Sensors: Capacitive Direct Metrology (Higher Performance) or Strain Gauges (Lower Cost)
- Outstanding Lifetime Due to PICMA® Piezo Actuators
- QuickLock Adapter for Easy Attachment
Direct Piezo Drive for Ultra-Fast Scanning and Positioning
The P-725.xDD microscope objective positioners were designed for extremely fast motion. Their ultra-stiff direct piezo drive (1.2 kHz resonant frequency) enables the highest scanning rates and response times of only 5 msecs - essential for time-critical tasks.
Superior Accuracy with Direct-Metrology Capacitive Nano-Measuring Sensors
Capacitive position feedback with sub-nanometer resolution is used. PI's proprietary capacitive sensors measure position directly and without physical contact. They are free of friction and hysteresis, a fact which, in combination with the positioning resolution of well under 1 nm, makes it possible to achieve very high levels of linearity. A further advantage of direct metrology with capacitive sensors is the high phase fidelity and the high bandwidth of up to 10 kHz.
Alternatively compact, more cost-efficient strain gauge sensors (SGS) featuring nanometer resolution are implemented. Absolute-measuring SGS-sensors are applied to appropriate places on the drive train and thus measure the displacement of the moving part of the stage relative to the base.
