Hexapods for 6-Axis Positioning
Compact Hexapod 6-Axis-Positioning System Precision Parallel-Kinematics Micropositioner with Controller
- Compact Hexapod design due folded linear actuators
- Motion Ranges to 45 mm (linear), 25° (rotation)
- Load Capacity to 10 kg, Self Locking Version
- Resolution to 7 nanometers
- Min. Incremental Motion to 300 nanometers
- Repeatability ±0.5 µm
- Velocity to 25 mm/sec
