3D Profiling of Small Components & Features
Fast and Reliable Sensor Placement and Scanning
Fast and reliable measurement of the surface profile of smallest components and features places high demands on the motion and control systems as well as on the sensor technology to ensure that the end products meet the requirements regarding functionality and quality. The decision of which sensor technology to use is based on criteria such as sensor resolution, measuring range, and speed of data acquisition. In case of a laser-based sensor, the size of the focal spot or measurement field or view area and the ability to focus must also be considered. The motion control system needs to be configured in a way that the sensor can be placed quickly and accurately at the point or in the areas of interest. This requires either a fast movement to the position and a short settling time, or a fast, uniform scanning of a specific area.
XY Axis – Fast Step-and-Scan Motion of the Sensor
- Ironless linear motors for high-dynamic, precise, and smooth motion for fast-step-and-scan
- Absolute encoders avoid referencing and ensure operational safety
- XY drag chain cable management maintains cable integrity and prolongs lifetime
>> V-855 High-Speed Linear Stage
Z Axis – Precise Vertical Motion of the Sensor
- High-precision ball screw linear stage with stepper motor and holding brake for reliable operation with simple and extremely stable positioning
- Folded drivetrain and compact design reduces installation space
- Low-weight design to maintain gantry dynamics
- Economically priced with fast delivery times
>> L-836 Stackable, Highly Compact, Universal Linear Stage
Z Axis – Sensor Focusing for Distance Control
- Voice coil direct drive motor for friction-free operation, high scan frequencies, and fast step-and-settle
- High-resolution linear encoders for accurate position feedback
- Adjustable weight force compensation for safe operation
- Easy integration thanks to flexible mounting options
>> V-308 Voice Coil PIFOC Focus Drive for Objectives
Measuring Surface Depths – Optical Distance Sensor
- Spot size down to 2 µm enables tiny features to be measured, as well as extremely precise positioning
- Wide range of working distances allows selection for various tasks and measuring ranges
- High resolution at fast speeds for dynamic autofocus compensation and high throughput
Advanced Automation Control
- EtherCAT® motion control and drive modules provide open network connectivity
- Conversion of sensor output to position data for fast output via analogue or digital interfaces
- Extensive motion controller algorithms for fast motion and settle, as well as smooth scanning
- Autofocus capabilities for dynamic focus adjustment
>> Controllers & Drivers
