Optical Delay Line Stages – How to Choose the Right One?
accuracy, and position stability. 20pm Resolution: In linear incremental encoders, the resolution, i.e., the smallest measurable displacement the sensor head can discern along the scale, is highly dependent [...] 200mm 300mm Delay Resolution, fs (nm) 0.035 (5) 0.07 (10) 0.07 (10) 0.07 (10) Max Speed, mm/s 390 500 1000 1000 Pitch, µrad 80 10 10 17.5 Yaw, µrad 15 10 10 17.5 Flatness, µm 0.25 0.5 0.75 1 Straightness