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Comparison: Nanopositioning Sensor Technologies

not heat up. PI nanopositioning systems use four different types of sensors: Capacitive sensors Strain gauges sensors (SGS) Piezoresistive sensors (PRS) Linear encoders Capacitive sensors for applications requiring highest precision
Capacitance Nanosensors

interferometer (top) Maximum Accuracy Through Direct Metrology Nanopositioning systems from PI use capacitive sensors of different sizes
Nanometer Precision: Nanopositioning Basics Tutorial. Piezo Nanopositioners, Scanning Stages, Flexure Guided Positioners | PI USA

selecting a stage metrology system are linearity, sensitivity (resolution), stability, bandwidth, and cost. Other factors include the ability to measure the moving platform directly and contact vs. noncontact measurement. Three types of sensors are typically used in piezo nanopositioning applications
XYZ Piezo Nanopositioning Stages – Flexure Guided 3-Axis Precision Positioners | PI USA

XYZ Piezo Nanopositioning Stages / Flexure Guided Stages Multi-axis piezo nanopositioning stages provide high performance motion for a variety of industrial and research applications. Semiconductor metrology related systems and high-resolution scanning microscopy have long
PInano® Piezo Microscope Stage for Super-Resolution Microscopy; Optical Tweezers, Optical Trapping, P-545, Super-Resolution Microscopy, by PI USA

® actuators feature cofired ceramic encapsulation and provide better performance and reliability than conventional piezo actuators. Actuators, guidance and sensors are maintenance-free, not subject to wear and offer extraordinary reliability. Nanopositioning Blog Microscopy
Download Catalogs on Precision Motion Control and Nanopositioning Products

Sensors Learn more Capacitive position sensors (capacitance sensors) provide position resolutions to 0.01 nanometer. Ideal for nanometrology applications ... Nanopositioning Controllers, Piezo
Buy PI Linear Stages Online

products, such as hexapods, air bearings, gantry systems, and nanopositioning systems. If you need help from a PI engineer selecting the right product, click here» Motorized Actuators: Servo, Stepper, Piezo Motor and Voice Coil Motors
Piezo Z-Stage, Piezo Z-Tip-Tilt Platform. Flexure Guided Nanopositioning Stages| PI USA

Vertical Nanopositioning Show more PIHera Piezo-Z Nanopositioner Compact, Direct Metrology 50 to 400µm Z-axis motion <1 Nanometer resolution Frictionless precision flexure guides Direct capacitive metrology X, XY, Z, XYZ combinations Details Buy Online
News & Precision Motion Product Announcements: Archive 2006-2014

analog controllers. It was designed for piezo actuators and nanopositioning stages which are equipped with cost effective measuring systems such as strain gauges or piezoresistive sensors. The advantage: higher precision, more control options and very simple operation. In addition, PI provides the full
Why All Piezo Motors are NOT Created Equal: The piezoelectric effect for precision motion control - PI Physik Instrumente.

5. Position Feedback Sensors for Closed-loop Control High accuracy position feedback is essential in a good nanopositioning system, and direct motion metrology is the preferred choice. Direct metrology measures motion where it matters most to the application. Examples of