Furthermore, the sensors need to be small and may not heat up. PI nanopositioning systems use four different types of sensors: Capacitive sensors Strain gauges sensors (SGS) Piezoresistive sensors (PRS) Linear [...] stack. Strain gauge sensors derive the position information from their expansion. Full-bridge circuits with several strain gauge sensors per axis improve thermal stability. Direct Sensor Technologies [...] The Right Position Sensor Technology PI offers the widest range of high-dynamics and high-resolution nanopositioning systems worldwide. Their linearity and repeatability would not be possible without

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principle of a capacitive sensor. An active guard ring electrode generates a homogenous field in the measurement area C Capacitance A Active sensor surface d Distance between sensor and target surface ε0 Constant [...] piezo nanopositioning system. The capacitive sensor (bottom) shows a considerably higher resolution than the laser interferometer (top) Maximum Accuracy Through Direct Metrology Nanopositioning systems [...] measurement. Capacitive position sensors can be integrated in the positioning system or attached externally. With two-plate sensors, measurement takes place between two defined sensor plates with matched surfaces

characteristics of each sensor type. Strain gauge sensors: There are two commonly used types of strain gauge sensors: piezo-resistive (semicoductor strain gauges) and film type sensors. They derive position [...] and linearity of piezoresistive sensors is sufficient. Johnson Noise : Resolution of all resistance type sensors such as strain gauge sensors and piezo-resistive sensors is limited by the intrinsic Johnson [...] Controller Choice Controllers / Interfacing Software Nanopositioning Stages NANOPOSITIONING BLOG Definition Nanopositioning device: Drive system & guiding system are frictionless and not limited in resolution

significantly more current, power, bandwidth and higher sensor resolution, at a lower price than comparable units of the past. P-725 fast nanopositioning focus motor shown with adapter inserts for microscope [...] Objective NanoFocusing Stage Provides 800µm Travel: P-725 Piezo Nanopositioning Scanner for AutoFocus and Metrology Piezo Lens Focusing Stages improved with Longer Travel Ranges to 800µm, Faster Step/Settle [...] award winning, MARS-rover tested PICMA® high-performance piezoelectric actuators the new P-725 nanopositioning stage family also features an improved, and stiffer motion amplifier and flexure guiding system

for Nanopositioning Subsystems (from Semicondutctor Fabtech , Issue 12, 2000) PDF Advances in Sensors , Flexure Design and Digital Control significantly increase precision of PZT Nanopositioning Stages [...] conference, by Scott Jordan, Peter Adib, Sergi Garcia-Manyes. PDF HTML Nanopositioning: how to make the right choices The range of nanopositioning solutions on the market is broader than ever before as applications [...] Ultrasonic Piezomotors, PiezoWalk Drives® and Flexure Guided Nanopositioning Stages. From Laser Focus World , June 2005. HTML Nanopositioning: Racing Forward From Photonics Directory PDF NEXLINE ® High

more Background knowledge on nanopositioning technology and designing with piezo actuators. Capacitive Position Sensors Learn more Capacitive position sensors (capacitance sensors) provide position resolutions [...] Ideal for nanometrology applications ... Nanopositioning Controllers, Piezo Drivers & Amplifiers Learn more Capacitive position sensors (capacitance sensors) provide position resolutions to 0.01 nanometer [...] air-bearing nanopositioning systems for wafer inspection Fast steering Mirrors for satellite-based internet Gantries for 3D surface profiling And much more DOWNLOAD | ADVANCED NANOPOSITIONING AND MOTION

interconnects, to wearable sensors, to LIDAR, quantum and optical computing, and to reliable, launch-proven fast steering mirror mounts. Other cutting-edge applications for PI nanopositioning solutions include [...] Technologies Demonstrators Check out our future technologies such as the 6-DOF Magnetic Levitation Nanopositioning Stage Demonstrator. Using the properties of magnetic levitation technology in the development [...] Winter Head of Piezo Drives & Systems Technology Physik Instrumente (PI)​ Beyond Precision: Nanopositioning in Cryogenic Applications Erlendur Kristjansson Senior Manager Product Marketing & Management

Actuators for Nanopositioning New Piezo Stepping Actuators in the Top Three Issue 40, 2009 Technical Progress with Ultrasonic Piezomotors S-340 Tip/Tilt Mirror Platform with New Sensors PILine® Technology: [...] Position Sensors Astronomy Contract Ultra-High Load LinearActuators Industrial Testing Issue 33, 2006 High Performance for Cost Sensitive Applications New Modular Controller for Capacitance Sensors M-824: [...] Newsletter Scan Systems for Microscopy New PI Ceramic Web Site PiezoMike Linear Actuator PIOne Nano Sensor Sub-nm Resolutoin Miniaturized Positioning Stages Die-Sinking EDM with Piezo Technology Fast Hexapod