M-014 High Precision Translation Stage / Linear Slide with Magnetic Bearings – Excellent Straightness, Flatness

  • Travel Range 25 mm
  • Straightness/Flatness £ 0.3 µm
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 µm Resolution w/ Closed Loop DC Motor
  • 5 nm Resolution with Closed Loop PZT Drive
  • 30 mm ø Clear Aperture

Application Examples

Microscopy, quality control, metrology, semiconductor test systems...

M-014 high performance magnetic bearing, high precision translation stages use magnetic preloads to improve the straightness and flatness of the linear slide. This magnetic preload results in extremely uniform and smooth motion with minimum friction of the table. Unlike conventional linear slides, where two bearings with limited parallelism guide the carriage (inducing runout and rotational errors) in M-014 precision linear slides only one of the two linear bearings has a guiding function (V-groove) while the second bearing only supports (U-groove) the top platform.

For the highest precision, see Air Bearing Stages here.

The coupling between the moving table and the drive units (closed loop servo motor drives, piezoelectric drives, micrometer drives) is not rigid but via magnets. This design allows only on-axis forces (drive direction) to be transmitted to the stage. Thus, torque-based positioning errors induced by non-parallelism between the driving axis and the linear bearing axis are eliminated.

M-014 high performance linear stages are available in 6 versions:

The basic translation stage version, M-014.00, is equipped with a precision manual micrometer providing a sensitivity of 1 µm. M -014.D0 linear slide is equipped with a closed loop servo motor drive providing 0.1 µm minimum incremental motion.

For both the manual and motorized version, closed loop and open loop piezo drives are available. They provide 5 nm minimum incremental motion over a travel range of 45 µm and allow for dynamic operation such as scanning and tracking. The closed loop PZT drive provides repeatability of 90 nm (see "PZT Actuators" section for further details on PZT actuators and recommended drivers).

Translation stages can be cross stacked and combined with the M-053.10 (manual versions) and M-053.20 (motorized versions) Z-axis mounting bracket to provide multi-axis motion. Vertical use of the M-014 is only permitted with loads less than 0.5 kg. For vertical positioning with loads in excess of 0.5 kg we recommend M-126 stages and the 125.90 Z-axis mounting bracket. More on linear translation stages.

Upgrades:

M-014 stages without PZT drives or DC servo motor drives can be upgraded at a later date.

Related Products and Additional Resources

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.

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