M-011 Miniature Precision Stages with Magnetic-Kinematic Bearings

  • Travel Range 15 mm
  • Straightness/Flatness £ 0.2 µm
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 µm Resolution w/Closed Loop DC Motor
  • 5 nm Resolution with Closed Loop PZT Drive

 

Application examples: Microscopy, quality control, metrology,...

 

M-011 Ultra-High Precision magnetically coupled stages use the force of integrated magnets to preload the stage. This magnetic preload results in extremely uniform and smooth motion with minimum friction. Unlike conventional stages, where two bearings with limited parallelism guide the carriage (inducing runout and rotational errors) in M-011 stages only one of the two linear bearings has a guiding function (V-groove) while the second bearing only supports (U-groove) the top platform.

The coupling between the stage and the drive units (DC motor drives, PZTs, micrometer drives) is not rigid but via magnets. This design allows only on-axis forces (drive direction) to be transmitted to the stage. Thus torque based positioning errors induced by non parallelism between the drive axis and the linear bearing axis are eliminated.

M-011 is available in 6 versions:
The basic version, M-011.00, is equipped with a precision manual micrometer providing a sensitivity of 1 µm. M-011.D0 is equipped with a closed loop DC motor drive providing 0.1 µm minimum incremental motion. For both the manual and motorized version, closed loop and open loop PZT drives are available. They provide 5 nm minimum incremental motion over a travel range of 30 µm and allow for dynamic operation such as scanning and tracking. The closed loop PZT drive provides repeatability of 60 nm (see "PZT Actuators" section for further details on PZT actuators and recommended drivers).

All stages can be cross stacked and combined with the M-052 Z-axis mounting bracket to provide multi-axis motion (vertical use of the M-011 only permitted with loads less than 0.1 kg, no extended Z-axis bracket for motorized Z-stage available).

Upgrades:
M-011 stages without PZT drives or DC motor drives can be upgraded at a later date. 

 

ORDERING INFORMATION:
M-011.00 Translation Stage, 15 mm
M-011.P0 Translation Stage, 15 mm, Manual + PZT Drive
M-011.PS Translation Stage, 15 mm, Manual + Closed Loop PZT Drive
M-011.D0 Translation Stage, 10 mm, DC Motor Drive
M-011.DP Translation Stage, 10 mm, DC Motor + PZT Drive
M-011.DS Translation Stage, 10 mm, DC Motor + Closed Loop PZT Drive

UPGRADES:
M-011.U0 Upgrade Kit with Open Loop PZT Drive
M-011.US Upgrade Kit with Closed Loop PZT Drive
M-011.UD Factory Installed Upgrade Kit with DC Motor Drive and Limit Switches

TECHNICAL DATA:

Models

M-011.00

M-011.P0

M-011.PS

M-011.D0

M-011.DP

M-011.DS

Units

Notes

Travel range

15

15

15

10

10

10

mm

 

PZT fine travel range

-

30

30

-

30

30

µm

 

Min. incremental motion
(PZT drive)

-

0.005

0.005

-

0.005

0.005

µm

A4

Repeatability (PZT drive)

-

-

0.06

-

-

0.06

µm

 

Design resolution (DC Motor)

-

-

-

0.059

0.059

0.059

µm

A3

Min. incremental motion

1

1

1

0.1

0.1

0.1

µm

A4

Unidirectional repeatability

-

-

-

0.1

0.1

0.1

µm

 

Bi-directional repeatability

-

-

-

5

5

5

µm

 

** Backlash

-

-

-

5*

5*

5*

µm

 

Straightness/ flatness per 5 mm

0.1

0.1

0.1

0.1

0.1

0.1

µm

 

Straightness/ flatness full travel

0.2

0.2

0.2

0.2

0.2

0.2

µm

 

Max. velocity

-

-

-

0.7

0.7

0.7

mm/sec

 

Max. normal load capacity

1

1

1

1

1

1

kg

B1

Max. push/pull force

7 / 5

7 / 5

7 / 5

7 / 5

7 / 5

7 / 5

N

B2

Max. lateral force

5

5

5

5

5

5

N

 

Drive

M-623 Micrometer

M-623 Micrometer

M-623 Micrometer

M-222.20
DC-Mike

M-222.20
DC-Mike

M-222.20
DC-Mike

   

PZT Drive

-

P-840.20

P-841.20

-

P-840.20

P-841.20

 

D1

Encoder resolution

-

-

-

60

60

60

counts/rev.

 

Drive screw pitch

0.5

0.5

0.5

0.5

0.5

0.5

mm/rev.

 

Gear ratio

-

-

-

(31/9)4 :1
» 141:1

(31/9)4 :1
» 141:1

(31/9)4 :1
» 141:1

   

Nominal motor power

-

-

-

2

2

2

W

 

Motor voltage range

-

-

-

0 to ±12

0 to ±12

0 to ±12

V

 

Weight

0.35

0.4

0.42

0.55

0.6

0.62

kg

 

Recommended motor controller

-

-

-

C-842, C-844

C-842, C-844

C-842, C-844

 

D2

Material

Al, St

Al, St

Al, St

Al, St

Al, St

Al, St

 

L

Recommended PZT controller

-

A, C, G

D, H

-

A, C, G

D, H

 

M

 

* gearhead ** the PZT drives are backlash free

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.

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