XY piezo stages can be designed in several ways. Wire EDM (Electric Discharge Machining) cut flexures provide the best guiding accuracy. For the highest performance and optimized dynamics, a monolithic planar design (single module) with parallel kinematics and parallel metrology position feedback is recommended. Stacked or nested X-Y stage axis designs are also available – they trade the flexibility of modularity with the added inertia/height and lower dynamic performance.
Frictionless XY-Motion with Nanometer Precision
Due to the frictionless design of drive system (solid-state piezo stack actuators), sensors, and the flexure-based guiding system, PI piezo nanopositioning stages can provide sub-nanometer positioning resolution. Most of PI's XY piezo stages are equipped with an ID chip that contains calibration data for the digital piezo controller, allowing stage an controller to be swapped in the field without the need for recalibration. The latest generation of digital controllers, also further enhances the bandwidth, linearity, and the position stability as well as step-and-settle times.