XY Piezo Flexure Nanopositioning Stages

XY and XYZ-piezo flexure nanopositioning stages can be designed in several ways. For the highest performance and optimized dynamics, a monolithic planar design with parallel kinematics and parallel metrology position feedback is recommended. Stacked or nested X and Y axis designs are also available.

PI offers a large variety of multi-axis piezo stages, most with large apertures for optics applications.

Applications include scan and alignment, interferometry, imaging, microscopy.

Compact XY Piezo Nanopositioning Stages

The PIHera XY product family comes in many sizes and travel ranges up to 1800µm. In addition to single axis and XY versions, Z stages are available that can be combined to form XYZ combinations. PIHera stages are available with capacitive position feedback for the highest linearity and  stability. 

The P-611 is an economical XY stage with strain gauge sensors and 100µm travel.

P-363 and P-313 provide small travel ranges of 5µm and 1µm respectively, but picometer range resolution and extremely high dynamics due to their direct-drive design. They are used for atomic force applications. The P-313 makes use of a highly linear electro-active material that does not require position feedback and allows higher bandwidth scanning.

PIHera Compact XY Piezo Stages
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PIHera Compact XY Piezo Stages

Direct Capacitive Metrology

  • 50 to 1800µm XY-motion
  • <1 nanometer resolution
  • Frictionless precision flexure guides
  • Capacitive feedback
  • X, XY, Z, XYZ combinations
P-611 Compact XY Piezo Stage
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P-611 Compact XY Piezo Stage

100µm, Affordable System

  • 100x100µm motion
  • 1 nanometer resolution
  • Compact footprint: 44x44mm
  • Strain gauge feedback
  • XZ and XYZ version also available
P-363 PicoCube XY Piezo Stages
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P-363 PicoCube XY Piezo Stages

Nanotechnology, SPM, AFM

  • 5µm motion, 50pm resolution
  • Ultra-high performance scanner for AFM/SPM, nano-manipulation
  • Closed-loop, parallel-metrology
  • Capacitive feedback
P-313 PicoCube XY Stage
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P-313 PicoCube XY Stage

Ultra-Linear Piezo Drive

  • 1µm motion
  • 20 picometer resolution
  • Highly linear piezo material
  • Does not require closed-loop operation
  • Faster response, higher bandwidth

XY Piezo Nanopositioning Stages with Aperture

These XY stages are designed with apertures to facilitate optical applications. Stages with direct-drives provide higher dynamics, but limited travel ranges. Integrated flexure motion amplifiers are used to provide longer travel ranges of 100µm and above. The U-780 is based on ultrasonic linear motors and provides travel ranges up to 100mm and above. It uses mechanical bearings instead of flexures.

P-713 OEM XY Piezo-Scanners
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P-713 OEM XY Piezo-Scanners

Fast: Image Scanning, Stabilization

  • 15x15µm motion
  • Compact: 45x45x6mm
  • Low cost – designed for OEMs
  • For stabilization, interlacing, resolution enhancement
P-612 XY Piezo-Nanopositioner
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P-612 XY Piezo-Nanopositioner

Compact, Aperture, Low Cost

  • 100x100µm motion
  • Small footprint: 60x60mm
  • <1 nanometer resolution
  • For cost-sensitive applications
  • 20x20mm aperture
P-763 XY-Piezo Nanopositioner
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P-763 XY-Piezo Nanopositioner

Compact, Aperture, Low Cost

  • 200x200µm motion
  • Small footprint: 70x70mm
  • <2 nanometer resolution
  • 30x30mm aperture
  • Capacitive direct metrology
P-733.2DD High-Dynamics Scanners
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P-733.2DD High-Dynamics Scanners

Fastest XY Piezo Stages

  • 30µm motion
  • Direct drive = Higher dynamics
  • Up to 2.2 kHz resonant frequency
  • 100 picometers resolution
  • Frictionless precision flexure guides
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P-545 Particle Tracking Stage

High Dynamics in XY/Z

  • 70x70x50µm motion
  • Direct drive = Higher dynamics
  • Easy integration in microscopes
  • Sub-nanometer resolution
P-733 XY Piezo Scanning Stages
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P-733 XY Piezo Scanning Stages

Parallel Metrology, 100µm

  • 100x100µm motion
  • <0.3 nanometer resolution
  • Capacitive feedback
  • 50x50mm aperture
  • Frictionless precision flexure guides
P-542 XY Piezo Stages
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P-542 XY Piezo Stages

Low-Profile, Large Aperture

  • 200x200µm motion
  • Low profile: 16.5mm
  • 80x80mm aperture
  • <1nm resolution, closed-loop
  • High-speed direct drive option
P-517, P-527 XY Piezo Stages
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P-517, P-527 XY Piezo Stages

Large Aperture, 100 & 200µm

  • 100 & 200µm motion range
  • Sub-nanometer resolution
  • Capacitive feedback
  • 66x66mm aperture
  • PICMA® long-life piezo drives
P-561/2/3 PImars Piezo Stages
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P-561/2/3 PImars Piezo Stages

High End Performance, to 300µm

  • 45, 100, 200, 300µm motion
  • Sub-nanometer resolution
  • Capacitive feedback
  • Ultra-fast direct drive option
  • PICMA® long-life piezo drives
P-734 XY Nanopositioning Stage
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P-734 XY Nanopositioning Stage

Ultra-Precision Trajectory Control

  • 100x100µm motion
  • Low bow: nanometer flatness
  • Sub-nanometer resolution
  • Direct-metrology = Higher precision
  • Ideal for surface analysis
  • 200µm motion 
  • Nanometer resolution
  • Easy integration in microscopes
  • Sensor choice: Piezoresistive (PRS) - lower cost; Capacitive - higher linearity
The U-780 is a novel, low-profile precision positioning stage for high-resolution microscopes. It comes complete with a controller and joystick. The motorized stage is based on PI’s patented ultrasonic ceramic linear motors. This drive technology provides extremely high stability – important for high resolution imaging. The motors are preloaded and automatically clamp when a position has been reached. Compared to conventional screw drives, position drift is significantly reduced. There is also no servo jitter as can be observed with electro-magnetic linear motors. No electric current is required and no heat is generated when resting at a position – further reducing drift and disturbances for highly sensitive measurements. The ultrasonic linear motors provide a very wide dynamic speed range from microns/second and below up to more than 100mm/sec. A linear encoder with 100nm resolution is integrated for each axis – this direct position measurement principle eliminates play and backlash. The U-780 system comes with many software tools, such as PIMikroMove, PI General Command Set (GCS) and drivers for LabVIEW. Compatible with µManager, MetaMorph, Andor iQ, MATLAB.
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U-780 Piezo Motor XY Stage System

Long Travel Microscope Stage

  • 135x85mm motion
  • Ultrasonic piezo linear motors
  • High dynamic range: <1µm to >100mm/sec
  • Self-clamping = High stability

How Piezo Actuators and Flexures Work

With the use of flexures mechanisms, the motion of a piezo stack can be multiplied many times to achieve up to one millimeter travel (or more in extreme cases).  Flexures can be designed to also double as guiding and preloading mechanisms. Flexure motion is based on the elastic deformation (flexing) of a solid material. Friction and stiction are entirely eliminated, and flexures exhibit high stiffness, load capacity, and resistance to shock and vibration. Flexures are maintenance free and not subject to wear. They are vacuum compatible, operate over a wide temperature range, and require neither lubricants nor compressed air for operation.