PIFOC® P-722, P-723 Piezo Focus Drive

  • Fast Piezo Drive for Focusing Applications with Nanometer Resolution
  • Travel to 350 µm
  • Precision Trajectory Control
  • Fast Settling

P-722/P-723 PIFOC ® Focus Drives are fast and compact piezo mechanisms units which can be mounted on most microscopes. The units are screwed between the turret and the objective, providing a positioning and scanning range of up to 350 µm with nanometer resolution while extending the optical path by only 13 mm (infinity corrected microscope required; extension tubes are available to adjust path lengths of other objectives on the turret). Standard thread is W 0.8x1/36", alternate threads are ordered separately.

In open loop, the vertical position of the objective roughly corresponds to the drive voltage. The open loop models P-722.00 / P-723.00 are ideal for fast tracking applications where the position is controlled by data provided by an external sensor (e.g. optical displacement sensor, a CCD camera, etc.). The closed loop versions allow for absolute position control, high linearity and repeatability based on an integrated position feedback sensor.

Application examples:
Fast Focus Drives, scanning interferometry, surface structure analysis, disk drive testing, autofocus systems, confocal microscopy, bio-technology, semiconductor test equipment.

Working principle:
PIFOC focus drive positioners are equipped with low voltage piezoelectric drives (0 to 100 V) integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a flexure parallelogram via an integrated motion amplifier. The wire EDM (Electric Discharge Machining) cut flexures are FEA (Finite Element Analysis) modeled for zero stiction/ friction, ultra-high resolution and exceptional guiding precision.

Optional threads for P-722.07/17 & P-723.07/17:

P-722.01 Thread M25x0.75 for P-722.07/17, P-723.07/17
P-722.02 Thread M26x0.75 for P-722.07/17, P-723.07/17
P-722.03 Thread M27x0.75 for P-722.07/17, P-723.07/17
P-722.04 Thread M28x0.75 for P-722.07/17, P-723.07/17
P-722.05 Thread M32x0.75 for P-722.07/17, P-723.07/17
P-722.06 Thread M26x1/36 for P-722.07/17, P-723.07/17
P-722.08 Thread M19x0.75 for P-722.07/17, P-723.07/17

Ordering Information:

  • P-722.00 PIFOC Objective Positioner & Scanner, 200 µm, Thread W0.8 x1/36"
  • P-722.07 PIFOC Objective Positioner & Scanner, 200 µm, Specify Thread (P-722.01 - .08)
  • P-722.10 PIFOC Objective Positioner & Scanner, 200 µm, LVDT, W0.8x1/36"
  • P-722.17 PIFOC Objective Positioner & Scanner, 200 µm, LVDT, Specify Thread (P-722.01 - .08)
  • P-723.00 PIFOC Objective Positioner & Scanner, 350 µm, Thread W0.8x1/36"
  • P-723.07 PIFOC Objective Positioner & Scanner, 350 µm, Specify Thread (P-722.01 - .08)
  • P-723.10 PIFOC Objective Positioner & Scanner, 350 µm, LVDT, W0.8x1/36"
  • P-723.17 PIFOC Objective Positioner & Scanner, 350 µm, LVDT, Specify Thread (P-722.01 - .08)
TECHNICAL DATA:

Models

P-722.00

P-722.10

P-723.00

P-723.10

Units

Notes

Max. objective diameter

39

39

39

39

mm

 

Open loop travel @ 0 to 100 V

200

200

350

350

µm ± 20 %

A2

Closed loop travel ³

-

200

-

350

µm

A5

Integrated feedback sensor

-

LVDT

-

LVDT

 

B

Closed / open loop ** resolution£

- / 2

10 / 2

- / 3

10 / 3

nm

C1

Closed loop linearity (typ.)

-

0.1

-

0.1

%

 

Full range repeatability (typ.)

 

±40

 

±60

nm

C3

Stiffness

0.38

0.38

0.32

0.32

N/µm ± 20 %

D1

Push/pull force capacity
(in operating direction)

20 / 20

20 / 20

20 / 20

20 / 20

N

D3

Tilt (Q X, Q Y) (typ.)

3

3

5

5

µrad

E1

Electrical capacitance

7.8

7.8

11.1

11.1

µF ± 20 %

F1

* Dynamic operating current
coefficient (DOCC)

4.8

4.8

3.9

3.9

µA/(Hz x µm)

F2

Unloaded resonant frequency

300

300

150

150

Hz ± 20 %

G2

Resonant frequency @ 150 g load

180

180

100

100

Hz ± 20 %

G3

Operating temperature range

- 20 to 80

- 20 to 80

- 20 to 80

- 20 to 80

° C

H2

Voltage connection

VL

VL

VL

VL

 

J1

Sensor connection

-

L

-

L

 

J2

Weight (with cables)

400

410

410

420

g ± 5 %

 

Body material

Al

Al

Al

Al

 

L

Recommended driver/controller

G, C, (A)

H, E

G, C, (A)

H, E

 

M

* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example: Sinusoidal scan of 30 µm at 10 Hz requires approximately 1.4 mA drive current (P-722).

** Noise equivalent motion with E-503 amplifier.

Related Products and Additional Resources

This is a legacy product that has been replaced by the P-725 focus drive.