- Amplified Piezo Actuator
- Displacement to 1000 µm
- Integrated Double Flexure Motion Amplifier
- Non-Magnetic Stainless Steel Design
P-290 is an amplified piezo actuator with a vertical stroke 1000 µm. It is designed for high resolution static and low dynamic positioning applications.
The latest generation of amplified piezo actuators is shown below:
Application Examples
Wafer inspection, nanopositioning, medical analysis, biology, optics
Working Principle
P-290 is a vertical Z-stage positioning platform driven by a piezoelectric drive system. The drive system consists of two stacked Piezo flexure tilt nanopositioning stages (similar to P-287) machined of one solid piece of stainless steel. Each of the two tilt stages is equipped with a high voltage piezoelectric stack (is there a link for this?) actuator (0 to -1000 V) integrated into a zero stiction/friction wire EDM (Electric Discharge Machining) cut flexure motion amplifier system. The positioning platform is guided by linear ball bearings to eliminate tilt.
More Vertical Translation stages (Z-stages) are shown below:
Options:
P-705.00 positive polarity.
Ordering Information:
P-290.00 Vertical Amplified Piezo Flexure Stage, 1000 µm
| TECHNICAL DATA: | |||
Models | P-290.00 | Units | |
Active axes | Z | ||
Open loop travel @ 0 to -1000 V | 1000 | µm ± 20 % | A4 |
** Open loop resolution £ | 100 | nm | C0 |
Stiffness | 0.07 | N/µm ± 20 % | D1 |
Push/pull force capacity | (50/10) | N | D3 |
Max. (+/-) normal load | 5 | kg | D4 |
Electrical capacitance | 500 | nF ± 20 % | F1 |
* Dynamic operating current coefficient | 0.63 | µA/(Hz x µm) | F2 |
Unloaded resonant frequency | 100 | Hz ± 20 % | G2 |
Voltage connection | VH | J1 | |
Operating temperature range | -20 to 80 | ° C | H2 |
Weight (with cables) | 280 | g ± 5 % | |
Body material | N-S, S | L | |
Recommended Amplifier/Controller | B, I | M | |
* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example: Sinusoidal scan of 300 µm at 5 Hz requires approximately 1 mA drive current.
** Noise equivalent motion with E-507 amplifier.
This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.