Wafer inspection, nanopositioning, medical analysis, biology, optics
P-290 is a vertical Z-stage positioning platform driven by a piezoelectric drive system. The drive system consists of two stacked Piezo flexure tilt nanopositioning stages (similar to P-287) machined of one solid piece of stainless steel. Each of the two tilt stages is equipped with a high voltage piezoelectric stack (is there a link for this?) actuator (0 to -1000 V) integrated into a zero stiction/friction wire EDM (Electric Discharge Machining) cut flexure motion amplifier system. The positioning platform is guided by linear ball bearings to eliminate tilt.
More Vertical Translation stages (Z-stages) are shown below: