P-290.00 Long Range Piezo Flexure Stage (Macroscale Piezoelectric Actuator)

  • Displacement to 1000 µm
  • Integrated Double Flexure Motion Amplifier
  • Non-Magnetic Stainless Steel Design

 

P-290 is a unique, piezoelectrically driven stage providing 1000 µm stroke. It is designed for high resolution static and low dynamic positioning applications.

Application examples:
Wafer inspection, nanopositioning, medical analysis, biology, optics.

Working principle:
P-290 is a vertical positioning platform driven by a piezoelectric drive system. The drive system consists of two stacked Piezo flexure tilt positioners (similar to P-287) machined of one solid piece of stainless steel. Each of the two tilt positioners is equipped with a high voltage piezoelectric stack actuator (0 to -1000 V) integrated into a zero stiction/friction wire EDM (Electric Discharge Machining) cut flexure motion amplifier system. The positioning platform is guided by linear ball bearings to eliminate tilt.

Options:
P-705.00 positive polarity.

Ordering Information P-290.00 Vertical Piezo Flexure Stage, 1000 µm

 

 

 

TECHNICAL DATA:

Models

P-290.00

Units

Notes

Active axes

Z

   

Open loop travel @ 0 to -1000 V

1000

µm ± 20 %

A4

** Open loop resolution £

100

nm

C0

Stiffness

0.07

N/µm ± 20 %

D1

Push/pull force capacity
(in operating direction)

(50/10)

N

D3

Max. (+/-) normal load

5

kg

D4

Electrical capacitance

500

nF ± 20 %

F1

* Dynamic operating current coefficient
(DOCC)

0.63

µA/(Hz x µm)

F2

Unloaded resonant frequency

100

Hz ± 20 %

G2

Voltage connection

VH

 

J1

Operating temperature range

-20 to 80

° C

H2

Weight (with cables)

280

g ± 5 %

 

Body material

N-S, S

 

L

Recommended Amplifier/Controller

B, I

 

M

 

* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example: Sinusoidal scan of 300 µm at 5 Hz requires approximately 1 mA drive current.

** Noise equivalent motion with E-507 amplifier.


 

 

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.

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