• Vertical Travel to 700 µm
  • Tilt to 0.7 degrees
  • Non-Magnetic Stainless Steel Design

 

P-287 is a high resolution, piezoelectrically driven flexure stage providing tilt up to 12 mrad and vertical travel up to 700 µm at the tip. A ball seat is machined into the tip to decouple the rotation if the P-287 is used as a linear drive. In this case an external guiding system is recommended (e.g. frictionless diaphragm spring).

Application examples:
Wafer inspection, nanopositioning, medical analysis, biology, optics.

Working principle:
P-287 positioners are equipped with high voltage piezoelectric drives (0 to -1000 V) integrated into a zero stiction/friction, ultra-high resolution wire EDM (Electric Discharge Machining) cut flexure motion amplifier system. The linear motion of the piezo translator produces an arc motion at the tip.

Low voltage versions of P-287 are available on request.

Options:
P-703.20 high vacuum modification

P-705.00 positive polarity

Ordering Information P-287.70 Vertical / Tilt Piezo Flexure Stage, 12 mrad, 700 µm

 

TECHNICAL DATA:

Models

P-287.70

Units

Notes

Active axes

θ X, (Z)

   

Open loop travel @ 0 to -1000 V

12 (700)

mrad (µm at tip) ± 20 %

A4

** Open loop resolution £

0.2 (7)

µrad (nm at tip)

C0

Stiffness (in operating direction)

0.13 (at tip)

N/µm ± 20 %

D1

Push/pull force capacity
(in operating direction)

80/10

N

D3

Electrical capacitance

290

nF ± 20 %

F1

* Dynamic operating current
coefficient (DOCC)

30
[0.5 /Hz x µm at tip]

µA/(Hz x mrad)

F2

Unloaded resonant frequency

380

Hz ± 20 %

G2

Operating temperature range

- 40 to 80

° C

H2

Voltage connection

VH

 

J1

Weight (with cables)

195

g ± 5 %

 

Body material

N-S

 

L

Recommended Amplifier/Controller

B, I

 

M

 

* Dynamic Operating Current Coefficient in µA per Hertz and mrad (µm).
Example: Sinusoidal scan of 10 mrad at 10 Hz requires approximately 3 mA drive current.

** Noise equivalent motion with E-507 amplifier.

 

 

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.

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