P-287 is a high resolution, piezoelectrically driven tilt stage for nanopositioning applications. This amplified piezo actuator flexure guided tilting stage provides tilt angles up to 12 mrad and vertical travel up to 700 µm at the tip. A ball seat is machined into the tip to decouple the rotation if the P-287 is used as a linear drive. In this case an external guiding system is recommended (e.g. frictionless diaphragm spring).
Application Examples
Wafer inspection, nanopositioning, medical analysis, biology, optics
The latest generation of amplified piezo actuators is shown below.
Working Principle
P-287 tilt stage nanopositioners are equipped with high voltage piezoelectric drives (0 to -1000 V) integrated into a zero stiction/friction, ultra-high resolution wire EDM (Electric Discharge Machining) cut flexure motion amplifier system. The linear motion of the piezo translator produces an arc motion at the tip.
Low voltage versions of P-287 are available on request.
Options:
P-703.20 High Vacuum Modification
P-705.00 Positive Polarity
Ordering Information:
P-287.70 Vertical / Tilt Piezo Flexure Stage, 12 mrad, 700 µm
| TECHNICAL DATA: | |||
Models | P-287.70 | Units | |
Active axes | θ X, (Z) | ||
Open loop travel @ 0 to -1000 V | 12 (700) | mrad (µm at tip) ± 20 % | A4 |
** Open loop resolution £ | 0.2 (7) | µrad (nm at tip) | C0 |
Stiffness (in operating direction) | 0.13 (at tip) | N/µm ± 20 % | D1 |
Push/pull force capacity | 80/10 | N | D3 |
Electrical capacitance | 290 | nF ± 20 % | F1 |
* Dynamic operating current | 30 | µA/(Hz x mrad) | F2 |
Unloaded resonant frequency | 380 | Hz ± 20 % | G2 |
Operating temperature range | - 40 to 80 | ° C | H2 |
Voltage connection | VH | J1 | |
Weight (with cables) | 195 | g ± 5 % | |
Body material | N-S | L | |
Recommended Amplifier/Controller | B, I | M | |
* Dynamic Operating Current Coefficient in µA per Hertz and mrad (µm).
Example: Sinusoidal scan of 10 mrad at 10 Hz requires approximately 3 mA drive current.
** Noise equivalent motion with E-507 amplifier.
This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.