P-770 Large Aperture XY Piezo Flexure NanoPositioner and Scanner

  • Precision Trajectory Control
  • For XY Scanning and Positioning
  • 200 x 200 mm Clear Aperture
  • 200 x 200 µm Range
  • Resolution < 10 nm

 

P-770 is a low profile XY, highly accurate scanning and positioning system, providing a positioning and scanning range of 200 x 200 µm with better than 10 nm resolution. P-770 was specially designed for semiconductor inspection systems.

The 200 x 200 mm clear aperture is ideal for all transmitted light applications such as mask alignment.

Application examples:
Metrology, nanopositioning, semiconductor test equipment, precision mask and wafer alignment, scanning interferometry, surface structure analysis, etc.

Working principle:
P-770 positioners are equipped with low voltage piezoelectric drives (0 to 100 V) integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure parallelogram via an integrated motion amplifier. The wire EDM (Electric Discharge Machining) cut flexures are FEA (Finite Element Analysis) modeled for zero stiction/friction, ultra-high resolution and exceptional guiding precision. Integrated LVDT (Linear Variable Differential Transformer) position feedback sensors provide high resolution and stability in closed loop operation (with PI electronics recommended below).


Ordering Information: P-770.00 Large Aperture XY PZT Flexure Stage, 200 µm, LVDT Sensor

See "PZT Control Electronics" section for our comprehensive line of low noise, modular and OEM control electronics for computer and manual control.

TECHNICAL DATA:

Models

P-770.00

Units

Notes

Active axes

X,Y

   

Open loop travel @ 0 to 100 V

200

µm ± 20 %

A2

Closed loop travel ³

200

µm

A5

Integrated feedback sensor

LVDT

 

B

Closed / open loop ** resolution £

10 / 2

nm

C1

Closed loop linearity (typ.)

0.1

%

 

Full range repeatability (typ.)

±20

nm

C3

Stiffness

0.2

N/µm ± 20 %

D1

Push/pull force capacity
(in operating direction)

50 / 10

N

D3

Max. (+/-) normal load

2

kg

D4

Electrical capacitance

14.4 / axis

µF ± 20 %

F1

* Dynamic operating current
coefficient (DOCC)

12 / axis

µA/(Hz x µm)

F2

Unloaded resonant frequency

90

Hz ± 20 %

G2

Operating temperature range

- 20 to 80

° C

H2

Voltage connection ***

D

 

J1

Sensor connection ***

D

 

J2

Weight

2000

g ± 5 %

 

Body material

Al

 

L

Recommended Amplifier/Controller

H, F

 

M

* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example: Sinusoidal scan of 50 µm at 10 Hz requires approximately 6 mA drive current.

** Noise equivalent motion with E-503 amplifier.

*** Adapter cable with LEMO connectors for sensor and operating voltage included.

P-770 Dimensions
Custom Designs for Volume Buyers

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.

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