P-762 Family of Piezo Flexure NanoPositioners and Scanners

  • 1, 2, 3 and 5 Axis Versions
  • Compact Design
  • 20 x 20 mm Clear Aperture
  • Travel 100 µm, Tilt to 3.4 mrad

 

P-762 series Piezo Flexure Stages are our smallest sensor equipped multi-axis flexure positioners and scanners. The following versions are available: X,   Z,  X-Y,   X-Y-Z,   Z-QX-QY and X-Y-Z-QX-QY.

All versions but the Z and X-Y-Z versions have a 20 x 20 mm clear aperture. The X-Y model consists of an X module and a slightly modified Y module. The Z-module is equipped with 3 Piezo stacks located on the corners of a triangle. The stacks are selected for equal displacement and electrically connected in parallel. A displacement sensor, mounted in the center of the triangle provides optimum stability. The Z-QX-QY module allows individual control of all three PZTs. The displacement is measured by three sensors. See equation in technical drawings below for tip and tilt calculation. The X-Y-Z version consists of an X-Y module stacked together with a Z module. The X-Y-Z-QX-QY version consists of the X-Y module and the Z-QX-QY module.

Application examples:
ntegrated optics, fiber alignment, semiconductor test equipment, scanning interferometry, disk drive testing, surface structure analysis, confocal microscopy, bio-technology, micromanipulation.

Working principle:
P-762 positioners are equipped with low voltage piezoelectric drives (0 to 100 V) integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure parallelogram via an integrated motion amplifier. The wire EDM (Electric Discharge Machining) cut flexures are FEA (Finite Element Analysis) modeled for zero stiction/friction ultra-high resolution and exceptional guiding precision. Integrated LVDT (Linear Variable Differential Transformer) position feedback sensors provide nanometer scale resolution and stability in closed loop operation (with PI electronics).


Ordering Information: P-762.1L PZT Flexure Stage, 100 µm, LVDT Sensor P-762.2L XY PZT Flexure Stage, 100 x 100 µm, LVDT Sensor P-762.3L XYZ PZT Flexure Stage, 100 x 100 x 100 µm, LVDT Sensor P-762.ZL Vertical PZT Flexure Stage, 100 µm, LVDT Sensor P-762.TL Z-QX-QY PZT Flexure Stage, 100 µm, ±2.6 mrad, ±1.7 mrad, LVDT Sensor P-762.5L X-Y-Z-QX-QY PZT Flexure Stage, 100 x 100 x 100 µm, ±2.6 mrad, ±1.7 mrad, LVDT Sensor

 

 

TECHNICAL DATA: P-762

Models

P-762.1L

P-762.2L

P-762.3L

P-762.ZL

P-762.TL

P-762.5L

Units

Notes

Active axes

X

X,Y

X,Y,Z

Z

Z,Q X,Q Y

X,Y,Z,Q X,Q Y

   

Open loop travel @ 0 to 100 V

100

100 x 100

100 x 100 x 100

100

100,
(± 2.6, ± 1.7)

100 x 100 x 100, (± 2.6, ± 1.7)

µm (mrad)
± 20 %

A2

Closed loop travel ³

100

100 x 100

100 x 100 x 100

100

100,
(± 2.6, ± 1.7)

100 x 100 x 100, (± 2.6, ± 1.7)

µm (mrad)

A5

Integrated feedback sensor

1 x LVDT

2 x LVDT

3 x LVDT

1x LVDT

3 x LVDT

5 x LVDT

 

B

Closed / open loop ** resolution £

10 / 1

10 / 1

10 / 1

10 / 1

10 / 1
(0.5 / 0.1)

10 / 1
(0.5 / 0.1)

nm (µrad)

C1

Closed loop linearity (typ.)

0.1

0.1

0.1

0.1

0.1

0.1

%

 

Full range repeatability (typ.)

±20

±20

±20

±20

±20 (±1 µrad)

±20 (±1 µrad)

nm

C3

Max. (+/-) normal load

5

5

2

2

2

2

kg

D4

Tilt (Q Y, Q Z) (typ.)

10

10

10

     

µrad

E1

Lateral runout (Y) £

10

         

nm

E2

Electrical capacitance

11

11 / axis

11 / axis

11

2.8 (ch1), 5.5 (ch2), 2.8 (ch3), see dwg

2 x 11 (X,Y), 2.8, 5.5, 2.8 (Z), see dwg

µF ± 20 %

F1

* Dynamic operating current
coefficient (DOCC)

14

14 / axis

14 / axis

14

3.5 (ch1,3)
7 (ch2)
see drawing

14 (X,Y)
3.5 (ch1,3)
7 (ch2)
see drawing

µA/(Hz x µm)

F2

Unloaded resonant
frequency

700

350

X,Y: 200 Z: 450

450

Z: 450

X,Y: 200 Z: 450

Hz ± 20 %

G2

Operating temperature range

- 20 to 80

- 20 to 80

- 20 to 80

- 20 to 80

- 20 to 80

- 20 to 80

° C

H2

Voltage connection

VL

2 x VL

3 x VL

VL

3 x VL

5 x VL

 

J1

Sensor connection

L

2 x L

3 x L

L

3 x L

5 x L

 

J2

Weight (with cables)

230

460

850

370

390

870

g ± 5 %

 

Body material

Al

Al

Al

Al

Al

Al

 

L

Recommended Amplifier/Controller

H, E

H, E

H, E

H, E

H, E

H, E

 

M

* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example (P-762.1L): Sinusoidal scan of 30 µm at 10 Hz requires approximately 4.2 mA drive current.

** Noise equivalent motion with E-503 amplifier.

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.

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