P-762 Multi-Axis Nanopositioning Stages

1, 2, 3 and 5 Axis Versions
Compact Design
20 x 20 mm Clear Aperture
Travel 100 µm, Tilt to 3.4 mrad

P-762 series closed-loop feedback multi-axis piezo nanopositioning stages are compact multi-axis flexure guided mechanisms for positioning and fast scanning. The following versions are available: X, Z, X-Y, X-Y-Z, Z-Tip/Tilt, and X-Y-Z- Tip/Tilt.

All versions but the Z and X-Y-Z translation stages have a 20 x 20 mm clear aperture. The X-Y model consists of an X module and a slightly modified Y module. The Z-module is equipped with 3 Piezo stacks located on the corners of a triangle. The stacks are selected for equal displacement and electrically connected in parallel. A displacement feedback sensor, mounted in the center of the triangle, provides optimum stability. The Z-theta_X-theta_Y module allows individual control of all three PZTs. The displacement is measured by three sensors. See equation in technical drawings below for tip and tilt calculation. The 3-axis translation stage (X-Y-Z) version consists of an X-Y module stacked together with a Z module. The X-Y-Z-Tip-Tilt version consists of the X-Y module and the Z- Tip-Tilt module. See more Tip-Tilt stages.

Integrated optics, photonics, fiber alignment stages, semiconductor test equipment, scanning interferometry, disk drive testing, surface structure analysis, confocal microscopy, bio-technology, micromanipulation

P-762 nanopositioning stages are equipped with ultra-reliable multilayer piezoelectric drives integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure parallelogram via an integrated motion amplifier. The wire EDM (Electric Discharge Machining) cut flexures are FEA (Finite Element Analysis) modeled for zero stiction/friction ultra-high resolution and exceptional guiding precision. Integrated LVDT (Linear Variable Differential Transformer) position feedback sensors provide nanometer scale resolution and stability in closed loop operation (with PI electronics).

Ordering Information:

P-762.1L PZT Nanopositioning Flexure Stage, 100 µm, LVDT Sensor

P-762.2L XY PZT Flexure Stage, 100 x 100 µm, LVDT Sensor

P-762.3L XYZ PZT Flexure Stage, 100 x 100 x 100 µm, LVDT Sensor

P-762.ZL Vertical PZT Flexure Stage, 100 µm, LVDT Sensor

P-762.TL Z-QX-QY PZT Flexure Stage, 100 µm, ±2.6 mrad, ±1.7 mrad, LVDT Sensor

P-762.5L X-Y-Z-QX-QY PZT Flexure Stage, 100 x 100 x 100 µm, ±2.6 mrad, ±1.7 mrad, LVDT Sensor

TECHNICAL DATA: P-762
Models	P-762.1L	P-762.2L	P-762.3L	P-762.ZL	P-762.TL	P-762.5L	Units	Notes
Active axes	X	X,Y	X,Y,Z	Z	Z,Q _X,Q _Y	X,Y,Z,Q _X,Q _Y
Open loop travel @ 0 to 100 V	100	100 x 100	100 x 100 x 100	100	100, (± 2.6, ± 1.7)	100 x 100 x 100, (± 2.6, ± 1.7)	µm (mrad) ± 20 %	A2
Closed loop travel ³	100	100 x 100	100 x 100 x 100	100	100, (± 2.6, ± 1.7)	100 x 100 x 100, (± 2.6, ± 1.7)	µm (mrad)	A5
Integrated feedback sensor	1 x LVDT	2 x LVDT	3 x LVDT	1x LVDT	3 x LVDT	5 x LVDT		B
Closed / open loop ** resolution £	10 / 1	10 / 1	10 / 1	10 / 1	10 / 1 (0.5 / 0.1)	10 / 1 (0.5 / 0.1)	nm (µrad)	C1
Closed loop linearity (typ.)	0.1	0.1	0.1	0.1	0.1	0.1	%
Full range repeatability (typ.)	±20	±20	±20	±20	±20 (±1 µrad)	±20 (±1 µrad)	nm	C3
Max. (+/-) normal load	5	5	2	2	2	2	kg	D4
Tilt (Q _{Y, Q Z}) (typ.)	10	10	10				µrad	E1
Lateral runout (Y) £	10						nm	E2
Electrical capacitance	11	11 / axis	11 / axis	11	2.8 (ch1), 5.5 (ch2), 2.8 (ch3), see dwg	2 x 11 (X,Y), 2.8, 5.5, 2.8 (Z), see dwg	µF ± 20 %	F1
* Dynamic operating current coefficient (DOCC)	14	14 / axis	14 / axis	14	3.5 (ch1,3) 7 (ch2) see drawing	14 (X,Y) 3.5 (ch1,3) 7 (ch2) see drawing	µA/(Hz x µm)	F2
Unloaded resonant frequency	700	350	X,Y: 200 Z: 450	450	Z: 450	X,Y: 200 Z: 450	Hz ± 20 %	G2
Operating temperature range	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	° C	H2
Voltage connection	VL	2 x VL	3 x VL	VL	3 x VL	5 x VL		J1
Sensor connection	L	2 x L	3 x L	L	3 x L	5 x L		J2
Weight (with cables)	230	460	850	370	390	870	g ± 5 %
Body material	Al	Al	Al	Al	Al	Al		L
Recommended Amplifier/Controller	H, E	H, E	H, E	H, E	H, E	H, E		M

* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example (P-762.1L): Sinusoidal scan of 30 µm at 10 Hz requires approximately 4.2 mA drive current.

** Noise equivalent motion with E-503 amplifier.