P-730, P-731 XY Nanopositioning Stage with Piezo Drive and Flexure Guidance - NanoPositioners and Scanners

P-731 Piezoelectrically driven XY-NanoPositioner — P-731 Piezoelectrically driven 2-Axis Flexure NanoPositioner

Precision Trajectory Control
For XY Scanning & Positioning
80 x 80 µm & 40 x 40 µm Versions
Resolution < 1 Nanometer
50 x 50 mm Clear Aperture

P-730 and P-731 high speed nanopositioning stages are piezo driven and flexure guided. Flexure Translation Stages are fast and highly accurate low profile, XY scanning and positioning systems. These two-axis, high precision linear stages provide a positioning and scanning range up to 80 x 80 µm (using an integrated flexure piezo amplifier) with sub-nanometer resolution. Closed-loop capacitive feedback sensor equipped versions are offered for highest accuracy, precision and repeatability in the nanometer and sub-nanometer range.

The 50 x 50 mm clear aperture is ideal for transmitted light applications such as near-field scanning microscopy, confocal microscopy or mask alignment in semiconductor applications. P-730 and P-731 2-axis precision positioning stages are designed for applications with loads up to 2 kg.

Scanning microscopy, semiconductor test equipment, precision mask and wafer alignment, scanning interferometry, surface structure analysis, bio-technology, micromanipulation and other applications where single plane, high precision X-Y motion is required

More on Long Travel High Precision Motorized XY Translation Stages

P-730 and P-731 piezo nanopositioners are equipped with ultra-high reliability multilayer amplified piezo drives (and direct drives) integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure parallelogram via an integrated motion amplifier. The wire EDM (Electric Discharge Machining) cut flexures are FEA (Finite Element Analysis) modeled for zero stiction/friction, ultra-high resolution and exceptional guiding precision. Integrated capacitive position feedback sensors provide sub-nanometer resolution and stability in closed loop operation (with PI electronics).

Ordering Information:

P-730.40 High Speed, XY Piezo Nanopositioning Flexure Stage, 40 x 40 µm

P-730.4L High Speed, XY Piezo Nanopositioning, 40 x 40 µm, Closed-Loop, LVDT Sensor

P-730.4C High Speed, XY Nanopositioning, 40 x 40 µm, Closed-Loop, Capacitive Sensor

P-731.80 XY PZT Flexure Stage, Amplified Piezo, 80 x 80 µm

P-731.8L XY PZT Flexure Stage, 80 x 80 µm, Closed-Loop, LVDT Sensor

P-731.8C XY PZT Flexure Stage, 80 x 80 µm, Closed-Loop, Capacitive Sensor

TECHNICAL DATA:
Models	P-730.40	P-730.4L	P-730.4C	P-731.80	P-731.8L	P-731.8C	Units	Notes
Active axes	X,Y	X,Y	X,Y	X,Y	X,Y	X,Y
Open loop travel @ 0 to 100 V	40 x 40	40 x 40	40 x 40	80 x 80	80 x 80	80 x 80	µm ± 20 %	A2
Closed loop travel ›	-	40 x 40	40 x 40	-	80 x 80	80 x 80	µm	A5
Integrated feedback sensor	-	2 x LVDT	2 x Capacitive	-	2 x LVDT	2 x Capacitive		B
Closed / open loop ** resolution ≤	- / 0.5	10 / 0.5	0.5 / 0.5	- / 1	10 / 1	1 / 1	nm	C1
Closed loop linearity (typ.)	-	0.1	0.03	-	0.1	0.03	%
Full range repeatability (typ.)	-	±20	±3	-	±20	±5	nm	C3
Stiffness	3	3	3	3	3	3	N/µm ± 20 %	D1
Push/pull force capacity (in operating direction)	300 / 100	300 / 100	300 / 100	300 / 100	300 / 100	300 / 100	N	D3
Max. (+/-) normal load	2	2	2	2	2	2	kg	D4
Tilt (θ _X/θ _Y) (typ.)	25/25	25/25	25/25	25/25	25/25	25/25	µrad	E1
Electrical capacitance	1.8 / axis	1.8 / axis	1.8 / axis	7.2 / axis	7.2 / axis	7.2 / axis	µF ± 20 %	F1
* Dynamic operating current coefficient (DOCC)	4.5 / axis	4.5 / axis	4.5 / axis	9 / axis	9 / axis	9 / axis	µA/(Hz x µm)	F2
Unloaded resonant frequency	500	500	500	500	500	500	Hz ± 20 %	G2
Resonant frequency @ 200 g load	400	400	400	400	400	400	Hz ± 20 %	G3
Resonant frequency @ 500 g load	250	250	250	250	250	250	Hz ± 20 %	G3
Operating temperature range	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	° C	H2
Voltage connection	2 x VL	2 x VL	2 x VL	2 x VL	2 x VL	2 x VL		J1
Sensor connection		2 x L	4 x C		2 x L	4 x C		J2
Weight (with cables)	550	580	580	550	580	580	g ± 5 %
Body material	Al	Al	Al	Al	Al	Al		L
Recommended Amplifier/Controller	G, C	H, E	H, L, F	G, C	H, E	H, L, F		M

* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example P-731: Sinusoidal scan of 30 µm at 10 Hz requires approximately 2.7 mA drive current.

** Noise equivalent motion with E-503 amplifier.