P-730, P-731 XY Piezo Flexure NanoPositioners and Scanners

  • Precision Trajectory Control
  • For XY Scanning & Positioning
  • 80 x 80 µm & 40 x 40 µm Versions
  • Resolution < 1 nm
  • 50 x 50 mm Clear Aperture

 

P-730 and P-731 Flexure Stages are fast and highly accurate low profile, XY scanning and positioning systems. They provide a positioning and scanning range up to 80 x 80 µm with sub-nanometer resolution. Capacitive feedback sensor equipped versions are offered for highest accuracy and repeatability in the nanometer and sub-nanometer range.

The 50 x 50 mm clear aperture is ideal for transmitted light applications such as near-field scanning microscopy, confocal microscopy or mask alignment. P-730 and P-731 are designed for applications with loads up to 2 kg.

Application examples:
Scanning microscopy, semiconductor test equipment, precision mask and wafer alignment, scanning interferometry, surface structure analysis, bio-technology, micromanipulation and other applications where single plane, high precision X-Y motion is required.

Working principle:
P-730 and P-731 positioners are equipped with low voltage piezoelectric drives (0 to 100 V) integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure parallelogram via an integrated motion amplifier. The wire EDM (Electric Discharge Machining) cut flexures are FEA (Finite Element Analysis) modeled for zero stiction/friction, ultra-high resolution and exceptional guiding precision. Integrated capacitive position feedback sensors provide sub-nanometer resolution and stability in closed loop operation (with PI electronics).

 

Ordering Information:

  • P-730.40 XY PZT Flexure Stage, 40 x 40 µm
  • P-730.4L XY PZT Flexure Stage, 40 x 40 µm, LVDT Sensor
  • P-730.4C XY PZT Flexure Stage, 40 x 40 µm, Capacitive Sensor
  • P-731.80 XY PZT Flexure Stage, 80 x 80 µm
  • P-731.8L XY PZT Flexure Stage, 80 x 80 µm, LVDT Sensor
  • P-731.8C XY PZT Flexure Stage, 80 x 80 µm, Capacitive Sensor

 

 

 

TECHNICAL DATA:

Models

P-730.40

P-730.4L

P-730.4C

P-731.80

P-731.8L

P-731.8C

Units

Notes

Active axes

X,Y

X,Y

X,Y

X,Y

X,Y

X,Y

  

Open loop travel @ 0 to 100 V

40 x 40

40 x 40

40 x 40

80 x 80

80 x 80

80 x 80

µm ± 20 %

A2

Closed loop travel ›

-

40 x 40

40 x 40

-

80 x 80

80 x 80

µm

A5

Integrated feedback sensor

-

2 x LVDT

2 x Capacitive

-

2 x LVDT

2 x Capacitive

 

B

Closed / open loop **
resolution ≤

- / 0.5

10 / 0.5

0.5 / 0.5

- / 1

10 / 1

1 / 1

nm

C1

Closed loop linearity (typ.)

-

0.1

0.03

-

0.1

0.03

%

 

Full range repeatability (typ.)

-

±20

±3

-

±20

±5

nm

C3

Stiffness

3

3

3

3

3

3

N/µm ± 20 %

D1

Push/pull force capacity
(in operating direction)

300 / 100

300 / 100

300 / 100

300 / 100

300 / 100

300 / 100

N

D3

Max. (+/-) normal load

2

2

2

2

2

2

kg

D4

Tilt (θ XY) (typ.)

25/25

25/25

25/25

25/25

25/25

25/25

µrad

E1

Electrical capacitance

1.8 / axis

1.8 / axis

1.8 / axis

7.2 / axis

7.2 / axis

7.2 / axis

µF ± 20 %

F1

* Dynamic operating current coefficient (DOCC)

4.5 / axis

4.5 / axis

4.5 / axis

9 / axis

9 / axis

9 / axis

µA/(Hz x µm)

F2

Unloaded resonant frequency

500

500

500

500

500

500

Hz ± 20 %

G2

Resonant frequency @ 200 g load

400

400

400

400

400

400

Hz ± 20 %

G3

Resonant frequency @ 500 g load

250

250

250

250

250

250

Hz ± 20 %

G3

Operating temperature range

- 20 to 80

- 20 to 80

- 20 to 80

- 20 to 80

- 20 to 80

- 20 to 80

° C

H2

Voltage connection

2 x VL

2 x VL

2 x VL

2 x VL

2 x VL

2 x VL

 

J1

Sensor connection

 

2 x L

4 x C

 

2 x L

4 x C

 

J2

Weight (with cables)

550

580

580

550

580

580

g ± 5 %

 

Body material

Al

Al

Al

Al

Al

Al

 

L

Recommended Amplifier/Controller

G, C

H, E

H, L, F

G, C

H, E

H, L, F

 

M

* Dynamic Operating Current Coefficient in µA per Hertz and µm.
Example P-731: Sinusoidal scan of 30 µm at 10 Hz requires approximately 2.7 mA drive current.

** Noise equivalent motion with E-503 amplifier.

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.

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