M-036 High Resolution Rotary Table for Precision Positioning

  • 360 ° Coarse Range, > 20 ° Fine Range
  • Precision Micrometer Drive
  • Piezo Option for High Resolution, Dynamic Scanning and Tracking
  • 30 mm Æ Clear Aperture

M-036 are high precision rotation tables for high resolution applications in metrology, test, and assembly. These high performance rotary tables feature high resolution, excellent repeatability and minimum wobble. The high performance precision rotary stages are equipped with double rotational ball bearings for minimum backlash and high load capacity. Both the rotation platform and the scale ring (graduated in 2-degree increments) can be independently coarse positioned over 360 degrees and then be locked by screws.

The basic version, of the rotary stage family, the M-036.00, is equipped with a micrometer drive and a zero-backlash magnetic coupling. The micrometer provides a positioning range of ±10.5 degrees.

The versions M-036.PS and M-036.P0 feature additional piezoelectric precision motors with closed loop feedback option for fine adjustment over a range of ±350 µrad. They also allow dynamic operation such as scanning or tracking. The .PS version is equipped with a closed loop feedback piezo drive (model P-841.30), while the .P0 version has an open loop piezoelectric  actuator (model P-840.30). Both drives provide a linear range of 45 microns and sub-nanometer linear resolution (see "PZT Actuators" section for further details and recommended drivers).

For the highest precision, and highest performance high speed air bearing rotary tables are recommended.

Upgrades:
M-036 stages without PZT drives or DC motor drives can be upgraded at a later date.

ORDERING INFORMATION:
M-036.00 Tangential Arm Rotation Stage, Ø 100 mm, Micrometer Drive
M-036.P0 Tangential Arm Rotation Stage, Ø 100 mm, Micrometer + PZT Drive
M-036.PS Tangential Arm Rotation Stage, Ø 100 mm, Micrometer + Closed Loop PZT Drive

Math on linear to rotation conversion see here.

UPGRADES:
M-036.U0 Upgrade Kit with Open Loop PZT Drive
M-036.US Upgrade Kit with Closed Loop PZT Drive
M-036.UD Factory Installed Upgrade Kit with DC Motor Drive

TECHNICAL DATA:

Models

M-036.00

M-036.P0

M-036.PS

Units

Notes

Rotation range coarse

360

360

360

deg

 

Rotation range (micrometer drive)

±10.5

±10.5

±10.5

deg

 

Rotation range (PZT drive)

-

±350

±350

µrad

 

Min. incremental motion (micrometer drive)

15

15

15

µrad

A4

Rotation / linear input

15

15

15

µrad / µm

A5

Tangent arm length

66

66

66

mm

A5

Min. incremental motion (PZT drive)

-

1

1

µrad

A4

Repeatability (PZT drive)

-

-

2

µrad

 

Wobble

< 75

< 75

< 75

µrad

 

Maximum axial force

±400

±400

±400

N

 

Maximum torque (q X, q Y)

± 6000

± 6000

± 6000

mNm

 

Maximum torque CW*

4500

4500

4500

mNm

 

Maximum torque CCW*

75

75

75

mNm

 

Drive

M-624

M-624

M-624

  

PZT drive

-

P-840.30

P-841.30

 

D1

Weight

0.85

0.95

0.97

kg

 

Material

Al, St

Al, St

Al, St

 

L

Recommended PZT controller

-

A, C, G

D, H

 

M

* CW: clockwise; CCW: counter-clockwise  

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.

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