M-035 Precision Rotary Table with Closed-Loop Servo Motor

  • Closed Loop Servo Feedback Motor with 1 µrad Resolution
  • Piezo Motor Option for High Resolution, Dynamic Scanning and Tracking
  • 360 ° Coarse Range, 12 ° Fine Range
  • 20 mm ∅ Clear Aperture
  • Standard Limit Switches

M-035 series high precision rotary tables rotation stages feature high resolution, excellent repeatability and minimum wobble. These high performance rotational positioning stages are equipped with double ball bearings for minimum backlash and high load capacity. Both the rotation stage platform and the scale ring (graduated in 2-degree increments) can be independently coarse positioned over 360 degrees and then be locked by screws.

The basic rotary table version, M-035.D0, is equipped with a DC servo motor drive providing a positioning range of ± 6.3 degrees. A set of limit switches eliminates the possibility of overtravel. For the highest precision and highest performance, high speed air bearing rotary tables are recommended.

The versions M-035.DS and M-035.DP provide additional piezoelectric fine adjustment over a range of ±520 µrad. The piezoelectric fine adjustment also allows dynamic operation such as scanning or tracking. The .DS version is equipped with a closed loop PZT drive (model P-841.30), while the .DP version comes with an open loop PZT drive (model P-840.30). Both drives provide a linear range of 45 microns and sub-nanometer linear resolution (see "PZT Actuators" section for further details and recommended drivers).

ORDERING INFORMATION:

M-035.D0 Tangential Arm Rotation Stage, ∅ 60 mm, DC Motor Drive

M-035.DP Tangential Arm Rotation Stage, ∅ 60 mm, DC Motor + PZT Drive

M-035.DS Tangential Arm Rotation Stage, ∅ 60 mm, DC Motor + Closed Loop PZT Drive

Math on linear to rotation conversion see here.

TECHNICAL DATA:

Models

M-035.D0

M-035.DP

M-035.DS

Units

Notes

Rotation range coarse

360

360

360

deg

 

Rotation range motorized

±6.3

±6.3

±6.3

deg

 

Rotation range (PZT drive)

-

±520

±520

µrad

 

Min. incremental motion (PZT drive)

-

1

1

µrad

 

Repeatability (PZT drive)

-

-

2

µrad

 

Design resolution (DC motor)

1.34

1.34

1.34

µrad

A3

Min. incremental motion (DC motor)

2

2

2

µrad

A4

Rotation / linear input

22.7

22.7

22.7

µrad / µm

A5

Tangent arm length

44

44

44

mm

A5

Unidirectional repeatability

10

10

10

µrad

 

** Backlash

100

100

100

µrad

 

Wobble

< 150

< 150

< 150

µrad

 

Max. velocity

0.9

0.9

0.9

° /sec

 

Maximum axial force

± 300

± 300

± 300

N

 

Maximum torque (q X, q Y)

± 3000

± 3000

± 3000

mNm

 

Maximum torque CW*

3000

3000

3000

mNm

 

Maximum torque CCW*

50

50

50

mNm

 

Drive

M-222.20
DC-Mike

M-222.20
DC-Mike

M-222.20
DC-Mike

  

PZT drive

-

P-840.30

P-841.30

 

D1

Weight

0.6

0.65

0.67

kg

 

Recommended PZT controller

-

A, C, G

D, H

 

M

Material

Al, St

Al, St

Al, St

 

L

Recommended motor controller

C-842, C-844

C-842, C-844

C-842, C-844

 

D2

 

* CW: clockwise; CCW: counter-clockwise

** the PZT drives are backlash free

 

Related Products and Additional Resources

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.

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