- Closed Loop Servo Feedback Motor with 1 µrad Resolution
- Piezo Motor Option for High Resolution, Dynamic Scanning and Tracking
- 360 ° Coarse Range, 12 ° Fine Range
- 20 mm ∅ Clear Aperture
- Standard Limit Switches
M-035 series high precision rotary tables rotation stages feature high resolution, excellent repeatability and minimum wobble. These high performance rotational positioning stages are equipped with double ball bearings for minimum backlash and high load capacity. Both the rotation stage platform and the scale ring (graduated in 2-degree increments) can be independently coarse positioned over 360 degrees and then be locked by screws.
The basic rotary table version, M-035.D0, is equipped with a DC servo motor drive providing a positioning range of ± 6.3 degrees. A set of limit switches eliminates the possibility of overtravel. For the highest precision and highest performance, high speed air bearing rotary tables are recommended.
The versions M-035.DS and M-035.DP provide additional piezoelectric fine adjustment over a range of ±520 µrad. The piezoelectric fine adjustment also allows dynamic operation such as scanning or tracking. The .DS version is equipped with a closed loop PZT drive (model P-841.30), while the .DP version comes with an open loop PZT drive (model P-840.30). Both drives provide a linear range of 45 microns and sub-nanometer linear resolution (see "PZT Actuators" section for further details and recommended drivers).
ORDERING INFORMATION:
M-035.D0 Tangential Arm Rotation Stage, ∅ 60 mm, DC Motor Drive
M-035.DP Tangential Arm Rotation Stage, ∅ 60 mm, DC Motor + PZT Drive
M-035.DS Tangential Arm Rotation Stage, ∅ 60 mm, DC Motor + Closed Loop PZT Drive
TECHNICAL DATA: | |||||
Models | M-035.D0 | M-035.DP | M-035.DS | Units | |
Rotation range coarse | 360 | 360 | 360 | deg | |
Rotation range motorized | ±6.3 | ±6.3 | ±6.3 | deg | |
Rotation range (PZT drive) | - | ±520 | ±520 | µrad | |
Min. incremental motion (PZT drive) | - | 1 | 1 | µrad | |
Repeatability (PZT drive) | - | - | 2 | µrad | |
Design resolution (DC motor) | 1.34 | 1.34 | 1.34 | µrad | A3 |
Min. incremental motion (DC motor) | 2 | 2 | 2 | µrad | A4 |
Rotation / linear input | 22.7 | 22.7 | 22.7 | µrad / µm | A5 |
Tangent arm length | 44 | 44 | 44 | mm | A5 |
Unidirectional repeatability | 10 | 10 | 10 | µrad | |
** Backlash | 100 | 100 | 100 | µrad | |
Wobble | < 150 | < 150 | < 150 | µrad | |
Max. velocity | 0.9 | 0.9 | 0.9 | ° /sec | |
Maximum axial force | ± 300 | ± 300 | ± 300 | N | |
Maximum torque (q X, q Y) | ± 3000 | ± 3000 | ± 3000 | mNm | |
Maximum torque CW* | 3000 | 3000 | 3000 | mNm | |
Maximum torque CCW* | 50 | 50 | 50 | mNm | |
Drive | M-222.20 | M-222.20 | M-222.20 | ||
PZT drive | - | P-840.30 | P-841.30 | D1 | |
Weight | 0.6 | 0.65 | 0.67 | kg | |
Recommended PZT controller | - | A, C, G | D, H | M | |
Material | Al, St | Al, St | Al, St | L | |
Recommended motor controller | C-842, C-844 | C-842, C-844 | C-842, C-844 | D2 |
* CW: clockwise; CCW: counter-clockwise
** the PZT drives are backlash free
This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.