PI’s direct-drive rotary tables with frictionless, brushless, closed-loop torque motors provide the best combination of high accuracy, high velocity, and maximum service life. PI provides closed-loop direct drive rotary tables with both mechanical bearings and air bearings. Stage models with large apertures and low profile are available. The stage design is optimized for high speed, stiffness, and high load capacity. If completely friction-free and maintenance free motion with virtually unlimited lifetime is required, air bearing rotation tables are recommended. These ultra-precision, high-speed rotary tables provide vibration-free motion with extremely high accuracy and negligible runout, wobble and eccentricity errors. The lack of lubricants makes these also clean room compatible and ideal for any high-performance metrology application in optics, photonics, and semiconductor manufacturing, test and metrology related projects.
Why Motorized Direct Drive Rotation Stages?
In contrast to worm gear driven rotary stages or belt-drive rotation stages, torque-motor direct drive stages eliminate play in gears, couplings or flex in drive belts, providing motion with zero backlash and excellent constancy of velocity, while achieving higher speed than worm-gear drives.
PI’s precision direct-drive, positioning tables can be used in high performance factory automation, research, semiconductor, and laser processing applications. Due to the use of brushless high-torque, motors with direct metrology position feedback, backlash is completely eliminated, and reliability is greatly improved.
What’s the difference between a Rotary Table and Rotary Stage?
Basically there is no difference. With larger models, a table is used more often, while smaller size models are often called stages.
What Angular Positioning Resolution can be Achieved?
With modern direct-metrology rotary encoders, sensor resolution down to 1/100th of a microrad is available on select models with large rotary table platforms, using the high interpolation factors modern closed-loop brushless motor controllers such as PI’s EtherCat based controllers provide.
Based on the high encoder resolution and powerful servo controllers, the direct-drive rotary tables also provide excellent velocity control, which is required in automation applications including high-speed laser processing, indexing, and semiconductor wafer inspection.
Most Direct Drive Rotation stages can be mounted horizontally and vertically, and with combinations all 3 rotary degrees of freedom (3DOF, pitch, yaw, and roll) can be addressed.