Linear Piezo Flexure Stages

PI’s  nanopositioning stages and scanners combine nanometer-precision resolution and guiding precision with minimum crosstalk. This makes them particularly suitable for reference applications in metrology, for microscopic processes, for interferometry or in inspection systems for semiconductor chip production.

Linear piezo stages with PICMA® piezo actuator drive and flexure guidings are available for travel ranges up to 1.5 mm.

Piezo Flexure Linear Stages

P-630 High Dynamics Piezo Nanopositioning System

P-753 LISA Linear Actuator and Stage

P-752 High-Precision Nanopositioning Stage

PI P-750

P-750 Piezo Nanopositioning System

P-611.1 Linear Piezo Positioning System

P-620.1 – P-629.1 PIHera Piezo Linear Precision Positioner

Featured Customizations

P-725KHDS PIFOC® Objective Scanner with High Dynamics