A-142 PIglide Voice Coil Linear Stage with Air Bearings
High Performance • Cleanroom-Compatible • Option for Vertical Mounting
- Size of the motion platform 75 mm × 80 mm
- Low overall height of 27 mm
- Travel range to 10 mm
- Load capacity to 3 kg
- Velocity to 450 mm/s
- Acceleration to 20 m/s2
Product overview
High-performance compact voice coil linear stage featuring air bearing guides. Maintenance free with unlimited lifetime, perfect for highly dynamic applications with high duty cycles and tight volumetric constraints.
Integrated counterbalance option to enable operation in vertical orientation.
Accessories and options
- PIglide filter and air preparation kits
- Pneumatic counterbalance for vertical mounting
Application fields
The linear stage is ideally suited for high-precision applications, such as metrology, photonics alignment systems, optics positioning, and scanning. The noncontact design is ideal for cleanroom applications. Electrical cables are not moved.
Specifications
Specifications
Motion | A-142.010A1 | A-142.010A2 | Tolerance |
---|---|---|---|
Active axes | X | X | |
Travel range in X | 10 mm | 10 mm | |
Acceleration in X, unloaded | 20 m/s² | 20 m/s² | max. |
Maximum velocity in X, unloaded | 450 mm/s | 450 mm/s | |
Straightness (Linear crosstalk in Y with motion in X) | ± 0.1 µm | ± 0.1 µm | typ. |
Flatness (Linear crosstalk in Z with motion in X) | ± 0.5 µm | ± 0.5 µm | typ. |
Positioning | A-142.010A1 | A-142.010A2 | Tolerance |
Bidirectional repeatability in X | ± 0.1 µm | ± 0.1 µm | typ. |
Positioning accuracy in X, calibrated | ± 0.2 µm | ± 0.2 µm | typ. |
Minimum incremental motion in X | 0.05 µm | 0.05 µm | typ. |
Integrated sensor | Incremental linear encoder | Incremental linear encoder | |
Sensor signal | Sin/cos, 1 V peak-peak | Sin/cos, 1 V peak-peak | |
Sensor resolution | 5 nm | 5 nm | |
Sensor signal period | 20 µm | 20 µm | |
Reference switch | Encoder index | Encoder index | |
Limit switches | Hall effect | Hall effect | |
Drive Properties | A-142.010A1 | A-142.010A2 | Tolerance |
Drive type | Voice coil | Voice coil | |
Nominal voltage | 48 V | 48 V | |
Peak voltage | 80 V | 80 V | |
Nominal current, RMS | 0.5 a | 0.5 a | typ. |
Peak current, RMS | 2 a | 2 a | typ. |
Drive force in negative direction of motion in X | 5 N | 5 N | typ. |
Drive force in positive direction of motion in X | 5 N | 5 N | typ. |
Peak force in negative direction of motion in X | 20 N | 20 N | |
Peak force in positive direction of motion in X | 20 N | 20 N | |
Force constant | 10 N/A | 10 N/A | |
Resistance phase-phase | 7 Ω | 7 Ω | typ. |
Inductance phase-phase | 7.8 mH | 7.8 mH | |
Back EMF | 9.7 V·s/m | 9.7 V·s/m | max. |
Mechanical Properties | A-142.010A1 | A-142.010A2 | Tolerance |
Guide | Air bearing guide with air preload | Air bearing guide with air preload | |
Moved mass in X, unloaded | 250 g | 250 g | |
Permissible push force in X | 10 N | 10 N | max. |
Permissible push force in Z | 30 N | 30 N | max. |
Permissible torque in θx | 0.5 N·m | 0.5 N·m | max. |
Permissible torque in θY | 0.5 N·m | 0.5 N·m | max. |
Overall mass | 600 g | 600 g | |
Material | Hardcoat aluminum, stainless steel mounting hardware | Hardcoat aluminum, stainless steel mounting hardware | |
Miscellaneous | A-142.010A1 | A-142.010A2 | Tolerance |
Connector | D-Sub 3W3 (m) | D-Sub 3W3 (m) | |
Sensor connector | D-sub 15-pole (m) | D-sub 15-pole (m) | |
Air bearing connection | Plug connection for hose with 4 mm outer diameter | Plug connection for hose with 4 mm outer diameter | |
Operating pressure | 445 to 515 (865 to 75 psi) kPa | 445 to 515 (65 to 75 psi) kPa | |
Air consumption | 28 L/min | 28 L/min | max. |
Air quality | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3 | |
Recommended controllers / drivers | A-81x ACS-based motion controller for medium power requirements, 2 / 4 / 6 axes A-82x ACS-based motion controller for high power requirements, 4 / 6 / 8 axes | A-81x ACS-based motion controller for medium power requirements, 2 / 4 / 6 axes A-82x ACS-based motion controller for high power requirements, 4 / 6 / 8 axes | |
Cable length | 0.5 m | 0.5 m | |
Operating temperature range | +15 to +25 °C | +15 to +25 °C |
Downloads
Datasheet
Documentation
User Manual A142D001
A-142 Series Miniature Linear Air Bearing Stage with Voice Coil Drive
3-D Models
3-D model A-142
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