Nano-Measuring Sensor

Capacitive, Nanometer Resolution Position Gauge for Nanometrology

D-510 series PISeca capacitive nanopositioning sensors perform non-contact measurements of geometric quantities representing separation, position, length or other linear dimension against electrically conductive references such as metallic planes.  They provide nanometer resolution

Due to a proprietary electrode design and linearization system in the signal conditioning electronics, these single-probe sensors combine superior resolution and linearity with very high bandwidth for dynamic measurements.

Standard systems come with measuring ranges from 20 to 500 µm. Capacitive nanometer position gauges such as PISeca are fundamentally very temperature stable and easy to work with.


Nanometer Sensors Overview

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