May 29, 2020 – The new L-509 vacuum compatible linear stage series is available in three vacuum classifications, from 7.5x10-7 Torr (10-6hPa) to 7.5x10-10 Torr (10-9hPa) UHV. The linear stage family provides high precision, with repeatability to 100 nanometers. Travel ranges from 1” to 4” (26mm to 102mm) are offered.
These motorized, vacuum compatible linear stages are based on a special, stress-relieved aluminum base and driven by a precision ground ballscrew. Only vacuum compatible components are used in the design and manufacture of the linear stages, for example, special types of plastic to allow bake-out temperatures of 250°F (~120°C) for the closed-loop system with position feedback encoder, and 300°F (~150°C) for the open loop stepper-motor driven version recommended for UHV up to 7.5x10-10 Torr (10-9hPa)