Motorized Linear Stages for Vacuum and Ultra High Vacuum

May 29, 2020 – The new L-509 vacuum compatible linear stage series is available in three vacuum classifications, from 7.5x10-7 Torr (10-6hPa) to 7.5x10-10 Torr (10-9hPa) UHV.  The linear stage family provides high precision, with repeatability to 100 nanometers. Travel ranges from 1” to 4” (26mm to 102mm) are offered.


Servo and Stepper Motors, Closed and Open Loop

These motorized, vacuum compatible linear stages are based on a special, stress-relieved aluminum base and driven by a precision ground ballscrew. Only vacuum compatible components are used in the design and manufacture of the linear stages, for example,  special types of plastic to allow bake-out temperatures of 250°F (~120°C) for the closed-loop system with position feedback encoder, and 300°F (~150°C) for the open loop stepper-motor driven version recommended for UHV up to 7.5x10-10 Torr (10-9hPa)

Working with You

PI’s in-house engineered systems and components have enabled customers around the world to increase their productivity and technological advantage for 5 decades. With a large basis of standard precision motion products and proven methodologies, PI can quickly modify existing designs or provide a fully customized OEM solution to fit the exact requirements of the application.

Related Vacuum Compatible Stages and Linear Actuators