- Hybrid System Combines Advantages of Piezoelectrics and Electromagnetic Drives
- 2 Nanometer Linear Encoder Resolution
- 100 mm Travel
- Velocities to 125 mm/sec
- Active Compensation of Stick/Slip During Startup and Settling
- Active Backlash Compensation
- Excellent Velocity Control
- Millisecond Settling to Nanometer Accuracy
- Reliable Execution of Minimal Increments
- High Drive and Holding Forces with Minimal Power
M-511.HD Long-Travel, High-Speed Nanopositioning Stage
The M-511.HD linear stage is based on the proven design of the M-5x1 precision micropositioning stage series, with an integrated, flexure-guided, piezo actuator added. The M-511.HD allows velocities to 125 mm/s with an encoder resolution of 2 nm and load capacity of 50 kg for horizontal operation.
Absolute Accuracy
The servo-control loops for both the motorized and the piezo drive use the same position sensor. The result is a motion system with hundreds of millimeters travel but with the precision of a piezo-based nanopositioning stage. The resolution and the positioning accuracy depend on the choice of the feedback sensor. PI hybrid systems currently use optical linear encoders with a resolution of 2 and 4 nm. Depending on the stage, a minimum incremental motion or a repeatability of 4 nm can be achieved over the entire travel range.
Typical Applications
Surface Inspection, Microscopy, Laser Technology, Interferometry Metrology
