Flexures as Levers
The travel range of a piezo actuator can also be multiplied by integrating a lever mechanism. The actuator is mechanically integrated in a flexure joint in such a way that the travel range is extended to up to 2 mm. Since simple lever structures lose a considerable amount of guiding accuracy and stiffness, however, the design requires much more complex geometries.
Flexures allow motions with extremely high path accuracy. To compensate for height or transversal offset, PI has developed special multi-link flexure guides. These guiding systems, which are used in most nanopositioning systems from PI, allow a flatness and straightness in the subnanometer or microradian range.