In the sample manipulator, a Hexapod, designed by PI for use in high vacuum, positions the samples, i.e. 10 mm × 10 mm substrates, relative to the incident X-rays. This allows the sample to be tilted by ±5° around the X and Y axes at a resolution of 0.001°. In addition, to compensate for different layer thicknesses, it can be moved in the direction of the Z axis, i.e., vertically to the sample surface, by up to 3 mm. Motions of ±6 mm in the X and Y directions allow scans at different positions of the sample surface. The Hexapod is mounted on a rotary stage, which can perform further positioning tasks if required.