Different Hybrid Drive Concepts to Solve Tough Positioning and Alignment Problems in the Nanometer Range
Tough Positioning and Alignment Problems in the Nanometer Range Novel Hybrid Actuators Combine High Force, Nanometer Precision, and High Dynamics When faced with challenging alignment applications, precision [...] precision motion system designers often have to live with an unsatisfactory compromise between accuracy, force, and dynamics. A new hybrid approach can solve many of these issues. Hybrid actuators combine the [...] Linear Voice Coil and Motor/Screw Drive Ball or roller screw drives provide high feed and holding forces, over long travel ranges. Friction in the drive screw and the linear guides limit resolution, linearity