S-330 θXθY Ultra-Fast Piezo Tip/Tilt Platforms

  • ±1mrad θX and θY Tilt Range
  • For Mirrors to 50 mm Ø
  • Sub-µrad Resolution
  • Closed Loop Versions
  • Differential Design for Excellent Temperature Stability

S-330 Piezo Tip/Tilt Platforms are fast and compact tilt units, providing precise angular movements of the top platform in two orthogonal axes. The tilt range is ±1 mrad (each axes) with sub-µrad resolution. Closed loop versions are available for highest accuracy and repeatability. S-330 systems are designed for mirrors up to 50 mm diameter and have outstanding angular stability over a wide temperature range. To match the CTE of Zerodur glass, the S-330 is equipped with an Invar top platform.

A) Drive Electronics for High Dynamic Applications
E-500 Chassis with 2 x standard and 1 x specially configured E-505.00 Amplifier Modules, optional specially configured E-509.S3 Position Servo Controller Module.

B) Drive Electronics for Static and Medium Dynamic Applications
E-500 Chassis with specially configured E-503.00 Amplifier Module, optional specially configured E-509.S3 Position Servo Controller Module (required for closed loop operation, see "Piezo Control Electronics" section for details).

Application examples:
Image stabilization, laser beam stabilzation, adaptive optics systems, laser beam steering & scanning, correction of polygon scanner errors.

Working principle:
S-330 Tilt Platforms are equipped with two pairs of low voltage piezoelectric linear drives (0 to 100 V) operating in push/pull mode. The stainless steel case is equipped with an integrated, FEA (Finite Element Analysis) modeled circular flexure featuring zero stiction/friction and exceptional guiding precision.

In open loop operation, the platform angle roughly corresponds to the drive voltage. The open loop model is ideal for applications where the position is controlled by an external loop based on data provided by a sensor (e.g. quad cell, CCD chip, ...).

The closed loop version is equipped with two pairs (one per axis) of Strain Gage sensors operated in a bridge circuit for ultra-high resolution and angular stability. They provide sub-µrad resolution and repeatability (with PI control electronics).

ORDERING INFORMATION:
S-330.10 θX and θ Y Piezo Tilt Platform ±1 mrad, Strain Gage Sensor
S-330.30 θ X and θ Y Piezo Tilt Platform ±1 mrad

TECHNICAL DATA:

Models

S-330.30

S-330.10

Units

Notes

Active axes

q X,q Y

q X,q Y

  

Open loop tilt angle @ 0 to 100 V

±1

±1

mrad ± 20 %

A2

Closed loop tilt angle ³

-

±1

mrad

A3

Integrated feedback sensor

-

4 x strain gauge

 

B

Closed / open loop ** resolution £

- / 0.05

0.1 / 0.05

µrad

C1

Closed loop linearity (typ.)

-

± 0.2

%

 

Full range repeatability (typ.)

-

± 2

µrad

C3

Electrical capacitance

3.6 / axis

3.6 / axis

µF ± 20 %

F1

* Dynamic operating current coefficient (DOCC)

0.22 / axis

0.22 / axis

µA/(Hz x µrad)

F2

Resonant frequency (f0) without mirror

3.3

3.3

kHz ± 20 %

G2

Resonant frequency w/ Æ 25 x 8 mm glass mirror

2.4

2.4

kHz ± 20 %

G3

Distance pivot point to platform surface (T)

6

6

mm

 

Platform moment of inertia

1530

1530

gmm²

 

Operating temperature range

- 20 to 80

- 20 to 80

° C

H2

Voltage connection

3 x VL, 2 m cable

3 x VL, 2 m cable

 

J1

Sensor connection

-

1 x L, 2 m cable

 

J2

Weight (w/o cables)

200

200

g ± 5 %

 

Material (case / platform)

N-S / I

N-S / I

 

L

* Dynamic Operating Current Coefficient in µA per Hertz and µrad. Example: Sinusoidal scan of 100 µrad at 10 Hz requires approximately 0.22 mA drive current.

** Noise equivalent motion with E-503 amplifier.  

 

 

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.

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