6-Axis Piezo Nanopositioning Stages – Flexure Guided Precision Positioners | PI USA
fast photonics alignment applications 6-Axis Stages - Piezo Nanopositioning Flexure Stages Show more P-562 6-Axis Piezo Stage High End Performance, 200µm 200µm linear motion (X, Y, Z) 1mrad rotation (pitch [...] resolution Parallel kinematics/metrology PICMA® long-life piezo drives Details Article Video Show more P-587 6-Axis Piezo Nanopositioner Long-Travel, Parallel Metrology 800x800x200µm linear motion 1 mrad rotation [...] rotary travel UHV-compatible to 10-9 hPa Ø100mm base, 90mm height Piezo motor, non magnetic Show more P-915 Piezo Hexapod 6-Axis, Highest Dynamics 70µm XYZ motion 1.4mrad rotation (pitch, yaw, roll) For 6-axis