Positioning in High Vacuum (HV) & Ultrahigh Vacuum (UHV)
measures taken to achieve the corresponding vacuum class. UHV to 10 -9 hPa: Precision linear stage L-509 for travel ranges from 26 to 102 mm and a repeatability to 0.1 µm. Vacuum class Motor Measuring system [...] stages, a chamber is available with a volume of approximately 10 l. The small vacuum chamber is equipped with a pump stand consisting of a 400 l/s (N2) turbomolecular pump and a pressure sensor for continuous [...] °C. A large chamber with a volume of 260 l is designed for large stages up to a length of 800 mm, hexapods, and for multi-axis systems. A pump stand with a 700 l/s (N2) turbomolecular pump and a pressure