Why All Piezo Motors are NOT Created Equal: The piezoelectric effect for precision motion control - PI Physik Instrumente.
Piezo Tubes Short travel (10 micron range) multi-axis motion feasible, often used as scanners in AFM. Piezo Shear Plates / Actuators Lateral motion, travel 10-20 microns, high stiffness, fast response [...] designs. High force, travel typically limited to 20 µm. Tube Actuators Often used as scanner tubes for AFM microscopy and for microdispensing (pump) applications. Very fast response (low inertia), low force