Why All Piezo Motors are NOT Created Equal: The piezoelectric effect for precision motion control - PI Physik Instrumente.
stages. Piezoresistive (Semiconductor) Strain Gauge Sensors Piezoresistive strain gauge sensors (PRS) are low-cost, high-resolution, but temperature-sensitive devices that are easily integrated in positioning [...] epoxy between the sensor and structure makes it a challenge to get sufficient long-term stability. PRS do not measure distance directly, but infer position of the moving platform from the nanoscale warping [...] of piezo ceramics changes significantly with amplitude, temperature, and load, up to approximately 200% of the unloaded small-signal capacitance at room temperature. Therefore, the operating limits graphs