Multi-Axis Motion for Vacuum Applications: New 6DOF Hexapod Motion Systems – Smaller than traditional 6-Axis Vacuum Stages
forces, and torques in your application. Specifications, Datasheet, More Information» Other Vacuum and UHV Positioning Products PI provides a wide range of vacuum and UHV compatible linear stages and rotary [...] as well. The hexapods provide very high resolution and repeatability to 0.1µm and 2 µrad, respectively. The vacuum series was designed from the ground up for vacuum compatibility, with each component qualified [...] MA – A hexapod offers motion in 6 degrees of freedom (XYZ, Pitch, Roll, Yaw). PI has designed and manufactured high precision hexapod systems for more than 3 decades and provides hundreds of models from