Interferometer Feedback for Piezo Linear Motor Provides Highly Accurate Motion with Sub-Nanometer Resolution
Video: Performance of Nanpositioners with Interferometer Feedback System Layout The setup contains an N-331.23 Piezo linear motor actuator (V8 PiezoWalk drive). A mirror attached to the end of the runner reflects [...] Lab ( more about PI’s nano metrology capabilities ) Results Fig. 3: 0.5nm steps executed with the N-331 linear motor actuator, controlled by the E-712.1AN controller, E-711.IS3 BiSS / SPI-interface card [...] The noise level is on the order of 155 picometers. When controlled with the interferometer, the N-331 linear motor can provide resolution significantly better than 0.5nm (see Fig. 3). The E-712 controller