Advances in Precision Positioning Stage Design-Optimized Outgassing and Motion Performance in Ultra-High Vacuum Applications
(UHV) : Pressure range <1×10-7 – 1×10-9 hPa Ultra-High Vacuum Grease (UHV-G) : Pressure range <1×10-7 – 1×10-9 hPa Ultra-High Vacuum Cryo (UHV-C) : Pressure range up to 1×10-9 hPa Extreme Ultra-High Vacuum [...] According to DIN28400-1:1900-5, the following are the specified vacuum ranges: Low Vacuum (FV ): Pressure range <1 – 1-10-3 hPa High Vacuum (HV) : Pressure range <1×10-3 – 10-7 hPa Ultra-High Vacuum (UHV) [...] Vacuum (EUHV) : Pressure range <1×10-9 – 1×10-11 hPa When specifying equipment for use in a required vacuum level it is important to work with a cognizant supplier who can help analyze the application and