3-DOF Precision Positioning Stages Supporting Laser Assisted Wafer Slicing
larger rotation angles, a low-profile rotary table, such as the A-634 , or a custom design, can be added on the A-322 cross axis. Learn more 2.1.1. A-322 Product Variants The A-322 planar XY + Theta stage [...] the low-profile Theta-Z rotary stage 2.1. A-322 High Performance XY Planar Stages and Motion Systems The A-322, a high performance XY planar motion system with a lapped flat granite base, provides excellent [...] directions during the transition. 2.2. A-63X High Performance Air Bearing Rotation Stage PI low profile rotary air bearing stages (models A-634, A-635, A-638) feature a high performance 3-phase brushless direct