Positioning in High Vacuum (HV) & Ultrahigh Vacuum (UHV)
Stainless steel, aluminum, titanium, bronze, FKM (e.g., Viton), ceramics, sapphire, PTFE (e.g., Teflon), PEEK, polyimide (e.g., Kapton), glass ceramics (e.g., Macor) The material may not outgas and must [...] and customized products that are precisely tailored to the requirements of the vacuum application, e.g. by appropriate drive components, material selection, design, and accessories as well as suitable [...] multilayer actuators offer high reliability and superior lifetime. Due to the use of inorganic materials, e.g. for insulation and electrical contact, they can be heated up to 150 °C. Depending on the configuration