XY Linear Piezo Motor Stages

Piezo motor-driven positioning stages differ from traditional piezo stack/flexure guided nanopositioning systems.  They combine elements of classical motorized positioners such as cross roller bearings, long travel ranges etc. but replace electromagnetic motors ( or motor / screw drive combinations) with electroceramic direct drives. 

The integrated planar XY positioning stages here are driven by ultrasonic piezo linear motors. Integrated XY stages have the benefit of a lower profile and reduced moving mass compared to a stack of two linear stages. Ultrasonic motors from PI with their associated controllers provide a very wide dynamic range from micrometers/second to 100’s of mm per second. They also provide fast step and settle and are intrinsically self-clamping at the end of every move and on power off.  Along with this comes extreme position stability (long term drift is significantly improved by the elimination of lubricant flow of screw-drive stages, see article here).

XY Linear Stages with Ultrasonic Piezo Motors

Wide Dynamic Range, Silent

Ultrasonic motors provide very fast start/stop behavior, smooth motion with a very wide dynamic range from microns/second to 100’s of millimeters/second. Both linear and rotary ultrasonic motors are based on compact piezo ceramic elements driven at high frequencies of 10’s to 100’s of kHz (beyond the human hearing range). Each oscillation cycle transfers nanoscopic motion to a linear or rotary ceramic surface bonded to a linear runner or rotary platform.

U-723 Miniature XY Linear Stage
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U-723 Miniature XY Linear Stage

Silent Ultrasonic Linear Motor

  • 22x22mm XY motion range
  • 10nm encoder resolution 
  • 200mm/sec velocity
  • 42x42mm footprint
  • Self clamping motor design
  • Vacuum options
U-751 XY Linear Stage
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U-751 XY Linear Stage

Silent Ultrasonic Linear Motor

  • 25x25mm XY motion range
  • 100nm encoder resolution 
  • 100mm/sec velocity
  • 170x170mm footprint
  • Self clamping motor design
  • Vacuum options
U-780 XY Microscope Stage
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U-780 XY Microscope Stage

Silent Ultrasonic Linear Motor

  • 135x85mm XY motion range
  • 100nm encoder resolution 
  • 120mm/sec velocity
  • Combines with piezo flexure scanners
  • Self clamping = Ultra-high stability
  • With joystick and controller