PIshift inertia-type piezo motors provide resolution in the micron to nanometer range. These extremely compact motors can be integrated into linear and rotary stages. The drive principle is based on a cyclical alternation of static and sliding friction between a moving runner and the drive element, related to the classic tablecloth trick.
Piezo inertia motors can be operated in open loop, but for high accuracy and repeatability, a position encoder is integrated in the stage. Vacuum compatible and non-magnetic versions are also offered. The PIShift piezo inertia drive is very quiet, due to its high operating frequency of 20 kHz.