Linear Piezo Motor Stages

Piezo motor-driven positioning stages differ from traditional piezo stack/flexure guided nanopositioning systems.  They combine elements of classical motorized positioners such as cross roller bearings, long travel ranges, etc., but replace electromagnetic linear motors (or motor / screw drive combinations) with electroceramic direct drives.

The compact piezo motor positioning stages on this overview page are grouped by the piezo motor type used internally.  Ultrasonic motors provide the highest speed, inertia motors are extremely small, but not as fast, and PiezoWalk® motors provide the highest forces and precision.  The video here explains the different drive principles. 

Miniature Linear Stages with Ultrasonic Piezo Motors

Wide Dynamic Range, Silent

Ultrasonic motors provide very fast start/stop behavior, smooth motion with a very wide dynamic range from microns/second to 100’s of millimeters/second.  Both linear and rotary ultrasonic motors are based on compact piezo ceramic elements driven at high frequencies of 10’s to 100’s of kHz (beyond the human hearing range). Each oscillation cycle transfers nanoscopic motion to a linear or rotary ceramic surface bonded to a linear runner or rotary platform. 

U-521 Miniature Linear Stage
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U-521 Miniature Linear Stage

Silent Ultrasonic Linear Motor

  • 18mm motion range
  • 0.1µm encoder resolution 
  • 200mm/sec velocity
  • 35x35mm footprint
  • Self clamping motor design
  • Vacuum options
U-523 Miniature Linear Stage
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U-523 Miniature Linear Stage

Silent Ultrasonic Linear Motor

  • 22mm motion range
  • 10nm encoder resolution 
  • 200mm/sec velocity
  • 42x42mm footprint
  • Self clamping motor design
  • Vacuum options
U-723 Miniature XY Linear Stage
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U-723 Miniature XY Linear Stage

Silent Ultrasonic Linear Motor

  • 22x22mm XY motion range
  • 10nm encoder resolution 
  • 200mm/sec velocity
  • 42x42mm footprint
  • Self clamping motor design
  • Vacuum options

Miniature Inertia Piezo Motor Linear Stages

Medium Velocity, Economical

PIshift inertia-type piezo motors provide resolution in the micron to nanometer range.  These extremely compact motors can be integrated into linear and rotary stages. The drive principle is based on a cyclical alternation of static and sliding friction between a moving runner and the drive element, related to the classic tablecloth trick.

Piezo inertia motors can be operated in open loop, but for high accuracy and repeatability, a position encoder is integrated in the stage. Vacuum compatible and non-magnetic versions are also offered. The PIShift piezo inertia drive is very quiet, due to its high operating frequency of 20 kHz. 

The Q-521 miniature piezo positioner is an even smaller version of the Q-522 series, with dimensions from 21×30×10mm. It comes in open and closed-loop versions with two linear encoder options for 1 and 4 namometer resolution, respectively. Vacuum compatible versions are also offered for pressures as low as 10-9 hP. Applications include optics and photonics, metrology, microscopy, micromanipulation, biotechnology and automation.
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Q-521 Sub-Miniature Linear Stage

Piezo Inertia Direct Drive Motor

  • 12, 22, 32mm motion range
  • 1nm encoder resolution option
  • 10mm/sec velocity
  • 21mm width, 10mm height
  • Self clamping motor, 1N
  • Vacuum options
The Q-522 series of economical mini positioning stages are equipped with a compact piezo stick-slop inertia motor. Featuring dimensions from 22x22x10mm, the Q-522 is one of the smallest precision linear stages available on the market, offered with travel ranges of 1/4", 1/2" and 1".  The optimized piezo motor direct drive enables resolution up to 1 nanometer and velocity to 10 mm/second. Open-loop and encoder equipped versions are available. Q-522 stages can be combined with the Q-612 series of miniature rotary positioners. No adapter plates are required for mounting.
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Q-522 Sub-Miniature Linear Stage

Piezo Inertia Direct Drive Motor

  • ¼”, ½”, 1” motion range
  • 1nm encoder resolution option
  • 10mm/sec velocity
  • 22mm width, 10mm height
  • Self clamping motor, 1N
  • Vacuum options
This low profile linear translation stage is driven by a PIshift inertia-type piezo motor. The closed-loop stage is equipped with a high precision optical linear encoder providing for nanometer-level repeatability. An open-loop version and vacuum compatible and non-magnetic versions are also offered. The PIShift piezo inertia drive is very quiet, due to its high operating frequency of 20 kHz. It provides high holding forces of 10 N. The drive principle works similar to the classic tablecloth trick, a cyclical alternation of static und sliding friction between a moving runner and the drive element.
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Q-545 Miniature Linear Stage

Piezo Inertia Direct Drive Motor

  • ½” &  1” motion range
  • 1nm encoder resolution option
  • 10mm/sec velocity
  • 45mm width, 15mm height
  • Self clamping motor, 8N
  • Vacuum options

Linear / Vertical Stages with Compact PiezoWalk® Motor (Medium Velocity)

Highest Precision

The N-565 compact linear stage and its complementary N-765 vertical stage are equipped with PiezoWalk® linear motors and PI’s ultra-high precision PIone linear encoder providing 0.5nm resolution.  The patented PiezoWalk® drive is based on the coordinated motion of several piezo actuators and combines piezo-class resolution in the sub-nanometer reange with long travel and extreme reliability.  The motors are self-locking at power off, with no heat generation at position hold and extreme position stability.

	Equipped with a PiezoWalk® direct drive linear motor, which combines piezo class resolution with long travel ranges, subnanometer resolution, high forces and stiffness, these nanopositioners are not subject to sliding friction or wear as motion is achieved when the “legs” lift off for each step. Designed for high-end applications in bio-nanotechnology, fiber-optics, microscopy, semiconductor testing, and metrology and scientific research in beamlines and laser labs.
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N-565 Nanometer-Precision Stage

PiezoWalk Direct Drive Motor

  • ½”, 1” and 2” motion range
  • 0.5nm encoder resolution
  • 10mm/sec velocity
  • 65mm width, 20mm height
  • Self clamping motor, 10N
  • Vacuum options
N-765 Nanometer-Precision Z-Stage
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N-765 Nanometer-Precision Z-Stage

PiezoWalk Direct Drive Motor

  • ¼” vertical motion range
  • 0.5nm encoder resolution
  • 2.5mm/sec velocity
  • 65x110mm footprint
  • Self clamping motor, 20N
  • Vacuum options
N-603 Ultra-Low Profile Stage
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N-603 Ultra-Low Profile Stage

Non-Magnetic, Vacuum-Compatible

  • 2mm motion range
  • 0.1µm sensor resolution
  • 8mm/sec velocity
  • 7.4mm low profile for serial mounting
  • Self clamping motor, 5N
  • For operation in strong magnetic fields