S-340 θXθY Ultra-Fast Piezo Tip/Tilt Platforms

  • ±1mrad θX and θY Tilt Range
  • For Mirrors to 100 mm Ø
  • Sub-µrad Resolution
  • Closed Loop Versions
  • Differential Design for Excellent Temperature Stability

S-340 Piezo Tip/Tilt Platforms are fast and compact tilt units, providing precise angular movements of the top platform in two orthogonal axes. The tilt range is ±1 mrad (each axes) with sub-µrad resolution. Closed loop versions are available for highest accuracy and repeatability. S-340 systems are designed for mirrors up to 100 mm diameter and have outstanding angular stability over a wide temperature range.

To match the CTEs of various mirror materials the following platforms are available (see ordering information):

Application examples:
Image stabilization, laser beam stabilization, adaptive optics systems, laser beam steering & scanning, correction of polygon scanner errors.

Working principle:
S-340 Tilt Platforms are equipped with two pairs of low voltage piezoelectric linear drives (0 to 100 V) operating in push/pull mode. The aluminum case is equipped with an integrated, FEA (Finite Element Analysis) modeled circular flexure featuring zero stiction/friction and exceptional guiding precision.

In open loop operation, the platform angle roughly corresponds to the drive voltage. The open loop models are ideal for applications where the position is controlled by an external loop based on data provided by a sensor (e.g. quad cell, CCD chip, ...).

The closed loop versions are equipped with two pairs (one per axis) of LVDT (Linear Variable Differential Transformer) sensors operated in a bridge circuit for ultra-high resolution and angular stability. They provide sub-µrad resolution and repeatability (with PI control electronics).

A) Drive Electronics for High Dynamic Applications
E-500 Chassis with 2 x standard and 1 x specially configured E-505.00 Amplifier Modules, specially configured E-509.L3 Position Servo Controller Module (required for closed loop operation, section for details).

B) Drive Electronics for Static and Medium Dynamic Applications
E-500 Chassis with specially configured E-503.00 Amplifier Module, specially configured E-509.L3 Position Servo Controller Module.

ORDERING INFORMATION: S-340.A0 qXqY Piezo Tilt Platform, ±1 mrad, Aluminum Top Plate S-340.i0 qXqY Piezo Tilt Platform, ±1 mrad, Invar Top Plate S-340.S0 qXqY Piezo Tilt Platform, ±1 mrad, Steel Top Plate S-340.T0 qXqY Piezo Tilt Platform, ±1 mrad, Titanium Top Plate S-340.AL qXqY Piezo Tilt Platform, ±1 mrad, Aluminum Top Plate, LVDT Sensor S-340.iL qXqY Piezo Tilt Platform, ±1 mrad, Invar Top Plate, LVDT Sensor S-340.SL qXqY Piezo Tilt Platform, ±1 mrad, Steel Top Plate, LVDT Sensor S-340.TL qXqY Piezo Tilt Platform, ±1 mrad, Titanium Top Plate, LVDT Sensor 

 

 

 

Platform

Recommended Mirror

Models

Aluminum

Aluminum

S-340.Ax

Invar

Zerodur Glass

S-340.ix

Titanium

BK7 Glass

S-340.Tx

Steel

 

S-340.Sx

 

TECHNICAL DATA:

Models

S-340.A0

S-340.AL

Units

Notes

Active axes

θX,θY

θX,θY

  

Open loop tilt angle @ 0 to 100 V

±1

±1

mrad ± 20 %

A2

Closed loop tilt angle ³

-

±1

mrad

A3

Integrated feedback sensor

-

4 x LVDT

 

B

Closed / open loop ***resolution

- / 0.1

0.5 / 0.1

µrad

C1

Closed loop linearity (typ.)

-

±0.1

%

 

Full range repeatability (typ.)

-

±1

µrad

C3

Electrical capacitance

7.2 / axis

7.2 / axis

µF ± 20 %

F1

* Dynamic operating current coefficient (DOCC)

0.45 / axis

0.45 / axis

µA/(Hz x µrad)

F2

** Unloaded resonant frequency (f0)

1.4

1.4

kHz ± 20 %

G2

** Resonant frequency w/ Ø 50 x 15 mm glass mirror

0.9

0.9

kHz ± 20 %

G3

** Resonant frequency w/ Ø 75 x 22 mm glass mirror

0.4

0.4

kHz ± 20 %

G3

Distance pivot point to platform surface (T)

7.5

7.5

mm

 

** Platform moment of inertia

18000

18000

gmm²

 

Operating temperature range

- 20 to 80

- 20 to 80

° C

H2

Voltage connection

3 x VL

3 x VL

 

J1

Sensor connection

-

2 x L

 

J2

Weight (w/o cables)

335

335

g ± 5 %

 

Material (case / platform)

Al / depends on version

Al / depends on version

 

L

* Dynamic Operating Current Coefficient in µA per Hertz and mrad. Example: Sinusoidal scan of 100 mrad at 10 Hz requires approximately 0.45 mA drive current.

** Value for aluminum top plate. Lower resonant frequency for other platforms due to higher moment of inertia: Titanium: +60%; Invar: +200%; steel: +190%.

*** Noise equivalent motion with E-503 amplifier.

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.

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